N. Knake

Atomic oxygen formation in a radio-frequency driven micro-atmospheric pressure plasma jet

Atomic oxygen formation in a radio-frequency driven micro-atmospheric pressure plasma jet is investigated using both advanced optical diagnostics and numerical simulations of the dynamic plasma chemistry. Laser spectroscopic measurements of absolute densities of ground state atomic oxygen reveal steep gradients at the interface between the plasma core and the effluent region. Spatial profiles resolving the interelectrode gap within the core plasma indicate that volume processes dominate over surface reactions. Details of the production and destruction processes are investigated in numerical simulations benchmarked by phase-resolved optical emission spectroscopy. The main production mechanisms are electron induced and hence most efficient in the vicinity of the plasma boundary sheath, where electrons are energized. The destruction is driven through chemical heavy particle reactions. The resulting spatial profile of atomic oxygen is relatively flat. The power dependence of the atomic oxygen density obtained by the numerical simulation is in very good agreement with the laser spectroscopic measurements.

Characterization of the effluent of a He/O2 microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry

The effluent of a microscale atmospheric pressure plasma jet (μ-APPJ) operated in helium with a small admixture of molecular oxygen (<1.6%) has been analyzed by means of two independent diagnostics, quantitative molecular beam mass spectrometry (MBMS) and two-photon absorption laser-induced fluorescence spectroscopy (TALIF). The atomic oxygen density, the ozone density and the depletion of molecular oxygen have been measured by MBMS and the atomic oxygen density has been validated by TALIF. Absolute atomic oxygen densities in the effluent up to 4.7×1015 cm-3 could be measured with a very good agreement between both diagnostics. In addition, ozone densities in the effluent up to 1.4×1015 cm-3 and an O2 depletion up to 10% could be measured by MBMS. The atomic oxygen density shows a maximum value at an O2 admixture of 0.6%, whereas the ozone density continues to increase toward higher O2 admixtures. With increasing distance from the jet, the atomic oxygen density decreases but is still detectable at a distance of 30 mm. The ozone density increases with distance, saturating at a distance of 40 mm. By applying higher powers to the μ-APPJ, the atomic oxygen density increases linearly whereas the ozone density exhibits a maximum.

Absolute atomic oxygen density distributions in the effluent of a microscale atmospheric pressure plasma jet

The coplanar microscale atmospheric pressure plasma jet (μ-APPJ) is a capacitively coupled radio frequency discharge (13.56 MHz, ~15 W rf power) designed for optimized optical diagnostic access. It is operated in a homogeneous glow mode with a noble gas flow (1.4 slm He) containing a small admixture of molecular oxygen (~0.5%). Ground state atomic oxygen densities in the effluent up to 2 × 1014 cm−3 are measured by two-photon absorption laser-induced fluorescence spectroscopy (TALIF) providing space resolved density maps. The quantitative calibration of the TALIF setup is performed by comparative measurements with xenon. A maximum of the atomic oxygen density is observed for 0.6% molecular oxygen admixture. Furthermore, an increase in the rf power up to about 15 W (depending on gas flow and mixture) leads to an increase in the effluents atomic oxygen density, then reaching a constant level for higher powers.

Atomic oxygen in a cold argon plasma jet: TALIF spectroscopy in ambient air with modelling and measurements of ambient species diffusion

By investigating the atomic oxygen density in its effluent, two-photon absorption laser-induced fluorescence (TALIF) spectroscopy measurements are for the first time performed in a cold argon/oxygen atmospheric pressure plasma jet. The measurements are carried out in ambient air and quenching by inflowing air species is considered. We propose a novel absorption technique in the VUV spectral range, where emission originating from within the discharge is used as light source to determine the inflow of atmospheric oxygen into the effluent. Furthermore, we propose a modelling solution for the on-axis density of inflowing ambient air based on the stationary convection?diffusion equation.

Spatially resolved diagnostics on a microscale atmospheric pressure plasma jet

Despite enormous potential for technological applications, fundamentals of stable non-equilibrium micro-plasmas at ambient pressure are still only partly understood. Micro-plasma jets are one sub-group of these plasma sources. For an understanding it is particularly important to analyse transport phenomena of energy and particles within and between the core and effluent of the discharge. The complexity of the problem requires the combination and correlation of various highly sophisticated diagnostics yielding different information with an extremely high temporal and spatial resolution. A specially designed rf microscale atmospheric pressure plasma jet (μ-APPJ) provides excellent access for optical diagnostics to the discharge volume and the effluent region. This allows detailed investigations of the discharge dynamics and energy transport mechanisms from the discharge to the effluent. Here we present examples for diagnostics applicable to different regions and combine the results. The diagnostics applied are optical emission spectroscopy (OES) in the visible and ultraviolet and two-photon absorption laser-induced fluorescence spectroscopy. By the latter spatially resolved absolutely calibrated density maps of atomic oxygen have been determined for the effluent. OES yields an insight into energy transport mechanisms from the core into the effluent. The first results of spatially and phase-resolved OES measurements of the discharge dynamics of the core are presented.

Absolute atomic oxygen density profiles in the discharge core of a microscale atmospheric pressure plasma jet

The micro atmospheric pressure plasma jet is an rf driven (13.56 MHz, ∼20 W) capacitively coupled discharge producing a homogeneous plasma at ambient pressure when fed with a gas flow of helium (1.4 slm) containing small admixtures of oxygen (∼0.5%). The design provides excellent optical access to the plasma core. Ground state atomic oxygen densities up to 3×1016 cm−3 are measured spatially resolved in the discharge core by absolutely calibrated two-photon absorption laser-induced fluorescence spectroscopy. The atomic oxygen density builds up over the first 8 mm of the discharge channel before saturating at a maximum level. The absolute value increases linearly with applied power.

Gas flow dependence of ground state atomic oxygen in plasma needle discharge at atmospheric pressure

We present clear evidence that ground state atomic oxygen shows two patterns near a surface in the helium plasma needle discharge. Two-photon absorption laser-induced fluorescence spectroscopy, combined with gas flow simulation, was employed to obtain spatially-resolved ground state atomic oxygen densities. When the feed gas flow rate is low, the radial density peaks along the axis of the needle. At high flow rate, a ring-shaped density distribution appears. The peak density is on the order of 1021 m−3 in both cases. The results are consistent with a previous report of the flow-dependent bacterial killing pattern observed under similar conditions.

Diagnostic based modelling of radio-frequency driven atmospheric pressure plasmas

Diagnostic based modelling (DBM) actively combines complementary advantages of numerical plasma simulations and relatively simple optical emission spectroscopy (OES). DBM is employed to determine absolute atomic oxygen ground state densities in a helium?oxygen radio-frequency driven atmospheric pressure plasma jet. A comparatively simple one-dimensional simulation yields detailed information on electron properties governing the population dynamics of excited states. Important characteristics of the electron dynamics are found to be largely insensitive to details of the chemical composition and to be in very good agreement with space and phase-resolved OES. Benchmarking the time and space resolved simulation allows us to subsequently derive effective excitation rates as the basis for DBM with simple space and time integrated OES. The population dynamics of the upper O 3p?3P (? = 844?nm) atomic oxygen state is governed by direct electron impact excitation, dissociative excitation, radiation losses and collisional induced quenching. Absolute values for atomic oxygen densities are obtained through tracer comparison with the upper Ar 2p1 (? = 750.4?nm) state. The presented results for the atomic oxygen density show excellent quantitative agreement with independent two-photon laser-induced fluorescence measurements.

Spectroscopic characterization of an atmospheric pressure μ-jet plasma source

A new method for determination of plasma parameters under atmospheric pressure conditions is formulated and applied for characterization of a radio-frequency μ-jet plasma source using He/O2 mixture. By applying absolutely calibrated optical emission spectroscopy and numerical simulation, the gas temperature in the active plasma region and plasma parameters (electron density and electron distribution function) are determined. The steady-state concentrations of different species such as oxygen atom and ozone in the plasma channel and in the effluent of the plasma source are calculated using measured plasma parameters and gas temperature. On the other hand, spatial distribution of steady-state densities of these species are measured using emission and absorption spectroscopy. A comparison of the results thus obtained and the validation of the new method against two-photon absorption laser-induced fluorescence spectroscopy measurements are discussed. In addition, the influence of the surface processes and gas flow regime on the loss of the active species in the plasma source are discussed.

Influence of target surfaces on the atomic oxygen distribution in the effluent of a micro-scaled atmospheric pressure plasma jet

Micro-scaled plasma jets with reactive process gases, e.g. oxygen, are applied for localized surface treatment. Here, investigations of the development and the spatial distribution of atomic oxygen are reported in the post-discharge effluent of a micro-scaled atmospheric pressure plasma jet. These measurements are supplemented by installation of planar targets of various materials in the effluent. The reactive species are detected by means of two-photon laser-induced fluorescence spectroscopy from the discharge, through the free effluent, up to distances of about 200 µm in front of a planar surface. Ozone density profiles are measured by UV absorption spectroscopy. The effect of the effluent on gold and plastic substrates and vice versa is investigated. In the free effluent, the atomic oxygen density falls off exponentially to about 2 × 1015 cm−3 at a distance of 6 mm from the jets nozzle. The implementation of a plastic target does not disturb the O distribution, resulting in a strictly localized etching of the target. In contrast, mounting of a gold target increases the oxygen density and spreads its distribution close to the target. For correlation, surface modifications by plasma treatment of plastic and gold substrates are analysed by UV laser microscopy and x-ray photoelectron spectroscopy.