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Naotaka Kubota

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Publication

Featured researches published by Naotaka Kubota.

Archive | 2002

Positive resist composition and method of forming resist pattern from the same

Takeshi Iwai; Naotaka Kubota; Satoshi Fujimura; Miwa Miyairi; Hideo Hada

Archive | 2002

Positive resist composition and method of forming resist pattern using the same

Satoshi Fujimura; Hideo Haneda; Takeshi Iwai; Naotaka Kubota; Yoshikazu Miyairi; 尚孝 久保田; 美和 宮入; 武 岩井; 英夫 羽田; 悟史 藤村

Archive | 2006

Positive type resist composition and resist pattern formation method using same

Takeshi Iwai; Naotaka Kubota; Satoshi Fujimura; Midwa Miyairi; Hideo Hada

Archive | 2004

Resin for resist composition, negative type resist composition and method for forming resist pattern

Atsushi Iwashita; Naotaka Kubota; Toshikazu Tachikawa; 尚孝 久保田; 淳 岩下; 俊和 立川

Archive | 2003

Method of forming resist pattern, positive resist composition, and layered product

Hideo Hada; Miwa Miyairi; Naotaka Kubota; Takeshi Iwai

Archive | 2005

Polymer compound, photoresist composition including the polymer compound, and resist pattern formation method

Toshiyuki Ogata; Syogo Matsumaru; Yohei Kinoshita; Hideo Hada; Daiju Shiono; Hiroaki Shimizu; Naotaka Kubota

Archive | 2002

Multilayered body for photolithographic patterning

Toshikazu Tachikawa; Fumitake Kaneko; Naotaka Kubota; Miwa Miyairi; Takako Hirosaki; Koutaro Endo

Journal of Photopolymer Science and Technology | 2003

Advanced Resist Design Using AFM Analysis for ArF Lithography

Naotaka Kubota; Tomohiko Hayashi; Takeshi Iwai; Hiroshi Komano; Akira Kawai

Archive | 2003

Method of producing (meth) acrylic acid derivative polymer for resist

Naotaka Kubota; Takeshi Iwai; Hideo Hada

Archive | 2008

METHOD FOR MANUFACTURING WIRE GRID POLARIZING ELEMENT AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DEVICE

Naotaka Kubota; Daisuke Sawaki; 尚孝 久保田; 大輔 澤木

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Collaboration

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Hideo Hada

Hitachi

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Takeshi Iwai

Ciba Specialty Chemicals

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Toshiyuki Ogata

University of Texas at Austin

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Akira Kawai

Nagaoka University of Technology

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Daiju Shiono

University of Hyogo

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