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Nerissa Draeger

Lam Research

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Publication

Featured researches published by Nerissa Draeger.

Archive | 2010

Novel gap fill integration

Kaihan Ashtiani; Michael Wood; John Drewery; Naohiro Shoda; Bart van Schravendijk; Lakshminarayana Nittala; Nerissa Draeger

Archive | 2008

Atomic layer removal process with higher etch amount

Nerissa Draeger; Harald Te Nijenhuis; Henner Meinhold; Bart van Schravendijk; Lakshmi Nittala

Archive | 2012

Flowable oxide deposition using rapid delivery of process gases

Collin K. L. Mui; Lakshminarayana Nittala; Nerissa Draeger

Archive | 2014

Flowable oxide film with tunable wet etch rate

Nerissa Draeger; Karena Shannon; Bart van Schravendijk; Kaihan Ashtiani

Archive | 2011

BOTTOM UP FILL IN HIGH ASPECT RATIO TRENCHES

Lakshminarayana Nittala; Karena Shannon; Nerissa Draeger; Megha Rathod; Harald Te Nijenhuis; Bart van Schravendijk; Michael Danek

Archive | 2011

Premetal dielectric integration process

Michal Danek; Bart van Schravendijk; Nerissa Draeger; Lakshminarayana Nittala

Archive | 2016

FLOWABLE DIELECTRIC FOR SELECTIVE ULTRA LOW-K PORE SEALING

Nerissa Draeger; Kaihan Ashtiani; Derek B. Wong; Bart van Schravendijk; George Andrew Antonelli; Artur Kolics; Lie Zhao; Patrick A. Van Cleemput

Archive | 2014

Low-k oxide deposition by hydrolysis and condensation

Nicholas Muga Ndiege; Krishna Nittala; Derek B. Wong; George Andrew Antonelli; Nerissa Draeger; Patrick A. Van Cleemput

Archive | 2010

Gap fill integration

Kaihan Ashtiani; Michael Wood; John Drewery; Naohiro Shoda; Bart van Schravendijk; Lakshminarayana Nittala; Nerissa Draeger

Archive | 2014

METHODS AND APPARATUS FOR FORMING FLOWABLE DIELECTRIC FILMS HAVING LOW POROSITY

Megha Rathod; Nerissa Draeger; Bart van Schravendijk; Kaihan Ashtiani

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Bart van Schravendijk

Lam Research

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Kaihan Ashtiani

Lam Research

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Derek B. Wong

Lam Research

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George Andrew Antonelli

Lam Research

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Harald Te Nijenhuis

Lam Research

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Patrick A. Van Cleemput

Lam Research

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Artur Kolics

Lam Research

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Katie Lynn Nardi

Lam Research

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Lie Zhao

Lam Research

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Megha Rathod

Lam Research

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