Nguyen Andrew | Researchain

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Featured researches published by Nguyen Andrew.

Archive | 2008

METHOD FOR PROCESSING WORKPIECE IN PLASMA REACTOR WITH GROUNDED RETURN PATH OF VARIABLE HEIGHT FOR CONTROLLING UNIFORMITY OF PLASMA ION DENSITY

Collins Kenneth S; Hanawa Hiroji; Ramaswamy Kartik; Buchberger Douglas A; Rauf Shahid; Bera Kallol; Wong Lawrence; Merry Walter R; Miller Matthew L; Shannon Steven C; Nguyen Andrew; Cruse James P; Carducci James; Detrick Troy S; Deshmukh Subhash; Sun Jennifer Y

Archive | 2013

Plasma processing apparatus and lid assembly

Carducci James D; Tavassoli Hamid; Balakrishna Ajit; Chen Zhigang; Nguyen Andrew; Buchberger Douglas A; Ramanswamy Kartik; Rauf Shahid; Collins Kenneth S

Archive | 2013

Plasma processing apparatus and lid assembly thereof (2)

Carducci James D; Tavassoli Hamid; Balakrishna Ajit; Chen Zhigang; Nguyen Andrew; Buchberger Douglas A; Ramanswamy Kartik; Rauf Shahid; Collins Kenneth S

Archive | 2012

Plasma reactor with reduced electrical skew using

Rauf Shahid; Collins Kenneth S; Bera Kallol; Ramaswamy Kartik; Hanawa Hiroji; Nguyen Andrew; Shannon Steven C; Wong Lawrence; Kobayashi Satoru; Detrick Troy S; Cruse James P

Archive | 2018

METHOD AND APPARATUS FOR CONTROLLING GAS FLOW TO A PROCESS CHAMBER

Nguyen Andrew; Chang Xue

Archive | 2018

PROCESS CHAMBER HAVING TUNABLE SHOWERHEAD AND TUNABLE LINER

Nguyen Andrew; Chang Xue Yang; Wang Haitao; Ko Kei Yu; Sadjadi Reza

Archive | 2018

다전극 기판 지지 조립체 및 위상 제어 시스템

Yang Yang; Ramaswamy Kartik; Lane Steven; Wong Lawrence; Rauf Shahid; Nguyen Andrew; Collins Kenneth S; Lindley Roger Alan

Archive | 2018

INDUCTIVELY COUPLED PLASMA CHAMBER HAVING A MULTI-ZONE SHOWERHEAD

Nguyen Andrew; Chang Xue

Archive | 2013

Plasma processing apparatus and substrate support assembly thereof

Carducci James D; Tavassoli Hamid; Balakrishna Ajit; Chen Zhigang; Nguyen Andrew; Buchberger Douglas A; Ramanswamy Kartik; Rauf Shahid; Collins Kenneth S

Archive | 2012

Low temperature absorption layer deposition and hi

Ramaswamy Kartik; Hanawa Hiroji; Gallo Biagio; Collins Kenneth S; Ma Kai; Parihar Vijay; Jennings Dean; Mayur Abhilash J; Al-Bayati Amir; Nguyen Andrew

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