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Dive into the research topics where Hanawa Hiroji is active.

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Featured researches published by Hanawa Hiroji.


Archive | 2008

METHOD FOR PROCESSING WORKPIECE IN PLASMA REACTOR WITH GROUNDED RETURN PATH OF VARIABLE HEIGHT FOR CONTROLLING UNIFORMITY OF PLASMA ION DENSITY

Collins Kenneth S; Hanawa Hiroji; Ramaswamy Kartik; Buchberger Douglas A; Rauf Shahid; Bera Kallol; Wong Lawrence; Merry Walter R; Miller Matthew L; Shannon Steven C; Nguyen Andrew; Cruse James P; Carducci James; Detrick Troy S; Deshmukh Subhash; Sun Jennifer Y


Archive | 1999

Änderungen in -oder in Beziehung zu - RF-Plasmareaktoren und deren Betriebsmethoden

Hanawa Hiroji


Archive | 2012

Plasma reactor with reduced electrical skew using

Rauf Shahid; Collins Kenneth S; Bera Kallol; Ramaswamy Kartik; Hanawa Hiroji; Nguyen Andrew; Shannon Steven C; Wong Lawrence; Kobayashi Satoru; Detrick Troy S; Cruse James P


Archive | 2017

METHOD AND APPARATUS FOR CLAMPING AND DECLAMPING SUBSTRATES USING ELECTROSTATIC CHUCKS

Ye Zheng John; Hanawa Hiroji; Rocha-Alvarez Juan Carlos; Manna Pramit; Tsiang Michael Wenyoung; Ko Allen; Wang Wenjiao; Lin Yongjing; Kulshreshtha Prashant Kumar; Han Xinhai; Kim Bok Hoen; Lee Kwangduk Douglas; Narasimha Karthik Thimmavajjula; Duan Ziqing; Padhi Deenesh


Archive | 2012

Low temperature absorption layer deposition and hi

Ramaswamy Kartik; Hanawa Hiroji; Gallo Biagio; Collins Kenneth S; Ma Kai; Parihar Vijay; Jennings Dean; Mayur Abhilash J; Al-Bayati Amir; Nguyen Andrew


Archive | 2012

A process for low temperature plasma deposition of

Ramaswamy Kartik; Hanawa Hiroji; Gallo Biagio; Collins Kenneth S; Ma Kai; Parihar Vijay; Jennings Dean; Mayur Abhilash J; Al-Bayati Amir; Nguyen Andrew


Archive | 2011

Low temperature plasma deposition process for carb

Ramaswamy Kartik; Hanawa Hiroji; Gallo Biagio; Collins Kenneth S; Ma Kai; Parihar Vijay; Jennings Dean; Mayur Abhilash J; Al-Bayati Amir; Nguyen Andrew


Archive | 2011

A semiconductor junction formation process includi

Ramaswamy Kartik; Hanawa Hiroji; Gallo Biagio; Collins Kenneth S; Ma Kai; Parihar Vijay; Jennings Dean; Mayur Abhilash J; Al-Bayati Amir; Nguyen Andrew


Archive | 2009

Resonanzstruktur mit räumlich getrennten plasma-seerators und schaltelementen

Hanawa Hiroji; Ramaswamy Katik; Collins Kenneth S; Nguyen Andrew; Monroy Gonzalo Antonio; Tanaka Tsutomu; Ye Yan


Archive | 1998

Verfahren und Gerät zur Plasmabearbeitung von Werkstücken

Hanawa Hiroji

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