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Nicole Auth

Carl Zeiss AG

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Publication

Featured researches published by Nicole Auth.

Archive | 2008

Methods and systems for removing a material from a sample

Nicole Auth; Petra Spies; Tristan Bret; Rainer Becker; Thorsten Hofmann; Klaus Edinger

Archive | 2009

method for electron beam induced etching

Nicole Auth; Petra Spies; Rainer Becker; Thorsten Hofmann; Klaus Edinger

Archive | 2009

Method for electron beam induced etching of layers contaminated with gallium

Nicole Auth; Petra Spies; Rainer Becker; Thorsten Hofmann; Klaus Edinger

Archive | 2014

Verfahren und Vorrichtung zum Schützen eines Substrats während einer Bearbeitung mit einem Teilchenstrahl

Thorsten Hofmann; Tristan Bret; Petra Spies; Nicole Auth; Michael Budach; Dajana Cujas

Archive | 2014

METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING BY A PARTICLE BEAM

Thorsten Hofmann; Tristan Bret; Petra Spies; Nicole Auth; Michael Budach; Dajana Cujas

Archive | 2009

Method for electron beam induced deposition of conductive material

Nicole Auth; Petra Spies; Rainer Becker; Thorsten Hofmann; Klaus Edinger

Archive | 2009

Verfahren zum elektronenstrahlinduzierten ätzen von mit gallium verunreinigten schichten

Nicole Auth; Petra Spies; Rainer Becker; Thorsten Hofmann; Klaus Edinger

Archive | 2013

Verfahren und Vorrichtung zum Schützen eines Substrats während einer Bearbeitung mit einem Teilchenstrahl Method and apparatus for protecting a substrate during a particle beam processing with a

Thorsten Hofmann; Tristan Bret; Petra Spies; Nicole Auth; Michael Budach; Dajana Cujas

Archive | 2009

Verfahren zum elektronenstrahlinduzierten ätzen von mit gallium implantierten schichten

Nicole Auth; Petra Spies; Rainer Becker; Thorsten Hofmann; Klaus Edinger

Archive | 2009

Procédé de gravure, induite par un faisceau d'électrons, de couches contaminées par du gallium

Nicole Auth; Petra Spies; Rainer Becker; Thorsten Hofmann; Klaus Edinger

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Collaboration

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Petra Spies

Carl Zeiss AG

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Thorsten Hofmann

Carl Zeiss AG

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Rainer Becker

Carl Zeiss AG

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Tristan Bret

Carl Zeiss AG

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Klaus Edinger

University of Maryland

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Dajana Cujas

Carl Zeiss AG

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Michael Budach

Carl Zeiss AG

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