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Dive into the research topics where Niraj Rana is active.

Publication


Featured researches published by Niraj Rana.


workshop on microelectronics and electron devices | 2008

Mechanism of Surface Bump Defect Formation in Phosphorus Doped Polysilicon-Silicon Nitride Film Stack

Anish Khandekar; Shyam Surthi; Vincent Hou; Niraj Rana; Benjamin Williams

Formation of bump defect on the surface of silicon nitride film deposited on top of phosphorus doped amorphous silicon layer was studied. The bump defect formation was found to be caused by localized phosphorus segregation on polysilicon surface. Wet chemical treatment of silicon surface involving HF- H2O2 chemistries were found to reduce bump defect formation.


Archive | 2006

Semiconductor fabrication processes

Kevin R. Shea; Niraj Rana


Archive | 2012

Solid state lighting devices and associated methods of manufacturing

Niraj Rana; Zaiyuan Ren


Archive | 2007

Highly selective doped oxide etchant

Niraj Rana; Prashant Raghu; Kevin J. Torek


Archive | 2006

Methods of etching polysilicon and methods of forming pluralities of capacitors

Prashant Raghu; Vishwanath Bhat; Niraj Rana


Archive | 2006

Methods of removing metal-containing materials

Kevin R. Shea; Niraj Rana


Archive | 2006

Method to address carbon incorporation in an interpoly oxide

Niraj Rana; Kevin R. Shea


Archive | 2007

Methods for etching doped oxides in the manufacture of microfeature devices

Niraj Rana


Archive | 2006

Semiconductor fabrication using a collar

Kevin J. Torek; Kevin R. Shea; Niraj Rana; Zhiping Yin


Archive | 2010

Methods of Etching Oxide, Reducing Roughness, and Forming Capacitor Constructions

Niraj Rana; Kevin R. Shea; Janos Fucsko

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