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Kevin R. Shea

Micron Technology

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Publication

Featured researches published by Kevin R. Shea.

Archive | 2010

Methods of forming a plurality of capacitors

Vishwanath Bhat; Kevin R. Shea

Archive | 2007

Double-sided container capacitors using a sacrificial layer

Gurtej S. Sandhu; Kevin R. Shea; Chris W. Hill; Kevin J. Torek

Archive | 2006

Semiconductor fabrication processes

Kevin R. Shea; Niraj Rana

Archive | 2005

Method of forming high aspect ratio structures

Kevin J. Torek; Kevin R. Shea

Archive | 2006

Methods of removing metal-containing materials

Kevin R. Shea; Niraj Rana

Archive | 2005

Reduced cell-to-cell shorting for memory arrays

Kevin R. Shea

Archive | 2014

Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material

Kevin R. Shea

Archive | 2006

Surface treatment of a dry-developed hard mask and surface treatment compositions used therefor

Kevin R. Shea; Kevin J. Torek

Archive | 2009

Methods of making capacitors, dram arrays and electronic systems

Mark Kiehlbauch; Kevin R. Shea

Archive | 2006

Method of etching nitrides

Kevin R. Shea

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Collaboration

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Kevin J. Torek

Micron Technology

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Niraj Rana

Micron Technology

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Mark Kiehlbauch

Micron Technology

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Brett W. Busch

Micron Technology

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Thomas A. Figura

Micron Technology

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Vishwanath Bhat

Micron Technology

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Anton J. DeVillers

Micron Technology

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Belford T. Coursey

Micron Technology

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Chris W. Hill

Micron Technology

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Farrell Good

Micron Technology

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