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Nobuyuki Nagayama

Tokyo Electron

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Publication

Featured researches published by Nobuyuki Nagayama.

Archive | 2001

Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism

Shigeru Senzaki; Toshiki Sasaki; Tadashi Aoto; Nobuyuki Nagayama; Kouji Mitsuhashi

Archive | 2000

Plasma processing container internal member and production method thereof

Yoshio Harada; Junichi Takeuchi; Tatsuya Hamaguchi; Nobuyuki Nagayama; Kouji Mitsuhashi

Archive | 2003

Internal member of a plasma processing vessel

Kouji Mitsuhashi; Hiroyuki Nakayama; Nobuyuki Nagayama; Tsuyoshi Moriya; Hiroshi Nagaike

Archive | 2007

Internal member for plasma-treating vessel and method of producing the same

Yoshio Harada; Junichi Takeuchi; Nobuyuki Nagayama; Kouji Mitsuhashi

Archive | 2010

METHOD OF REUSING A CONSUMABLE PART FOR USE IN A PLASMA PROCESSING APPARATUS

Nobuyuki Nagayama; Naoyuki Satoh; Keiichi Nagakubo; Kazuya Nagaseki

Archive | 2003

Method of cleaning a plasma processing apparatus

Taira Takase; Nobuyuki Nagayama; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2009

ELECTROSTATIC CHUCK MEMBER

Nobuyuki Nagayama; Yoshio Harada; Junichi Takeuchi

Archive | 2007

THERMAL SPRAY POWDER, METHOD FOR FORMING THERMAL SPRAY COATING, AND PLASMA RESISTANT MEMBER

Hiroyuki Ibe; Isao Aoki; Junya Kitamura; Hiroaki Mizuno; Yoshiyuki Kobayashi; Nobuyuki Nagayama

Archive | 1999

Cleaning fluid and cleaning method for component of semiconductor-treating apparatus

Kenichi Hirota; Hitoshi Yamada; Kiyoshi Yuasa; Eiji Yamaguchi; Shinichi Kawaguchi; Takahiro Shimoda; Nobuyuki Nagayama

Archive | 2010

Temperature control system and temperature control method for substrate mounting table

Yasuharu Sasaki; Ryo Nonaka; Nobuyuki Nagayama

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Collaboration

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Kouji Mitsuhashi

Tokyo Electron

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Hiroyuki Nakayama

Mitsubishi

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Junichi Takeuchi

Ebara Corporation

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Yoshio Harada

Ebara Corporation

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Keiichi Nagakubo

Tokyo Electron

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Naoyuki Satoh

Tokyo Electron

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Eiji Yamaguchi

Tokyo Electron

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Hitoshi Yamada

Tokyo Electron

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Kenichi Hirota

Tokyo Electron

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Kiyoshi Yuasa

Tokyo Electron

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