Is this you? Create Your Porfile
Avatar

Kouji Mitsuhashi

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Kouji Mitsuhashi is active.

Explore More

Publication

Featured researches published by Kouji Mitsuhashi.

Archive | 2001

Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism

Shigeru Senzaki; Toshiki Sasaki; Tadashi Aoto; Nobuyuki Nagayama; Kouji Mitsuhashi

Archive | 2000

Plasma processing container internal member and production method thereof

Yoshio Harada; Junichi Takeuchi; Tatsuya Hamaguchi; Nobuyuki Nagayama; Kouji Mitsuhashi

Archive | 2007

Method and apparatus for an improved baffle plate in a plasma processing system

Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2003

Internal member of a plasma processing vessel

Kouji Mitsuhashi; Hiroyuki Nakayama; Nobuyuki Nagayama; Tsuyoshi Moriya; Hiroshi Nagaike

Archive | 2002

Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system

Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2007

Internal member for plasma-treating vessel and method of producing the same

Yoshio Harada; Junichi Takeuchi; Nobuyuki Nagayama; Kouji Mitsuhashi

Archive | 2004

Method and apparatus for an improved optical window deposition shield in a plasma processing system

Kouji Mitsuhashi; Hidehito Saigusa; Taira Takase; Hiroyuki Nakayama

Archive | 2002

Method and apparatus for an improved upper electrode plate in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2002

Method and apparatus for an improved deposition shield in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2007

Method and apparatus for an improved bellows shield in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Explore More

Collaboration

Dive into the Kouji Mitsuhashi's collaboration.

Top Co-Authors
Avatar

Hiroyuki Nakayama

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Nobuyuki Nagayama

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Taira Takase

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hidehito Saigusa

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Tsuyoshi Moriya

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Junichi Takeuchi

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Yoshio Harada

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Kosuke Imafuku

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Shigeru Senzaki

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Tadashi Aoto

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge