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Ogihara Tsutomu

Shin-Etsu Chemical

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Publication

Featured researches published by Ogihara Tsutomu.

Archive | 2005

SACRIFICIAL FILM FORMING COMPOSITION, PATTERN FORMING METHOD, SACRIFICIAL FILM AND METHOD FOR REMOVING THE SAME

Hamada Yoshitaka; Ogihara Tsutomu; Iwabuchi Motoaki; Asano Takeshi; Ueda Takafumi; Pfeiffer Dirk

Archive | 2004

Composition for forming porous film, porous film and its manufacturing process, interlayer dielectrics and semiconductor device

Ogihara Tsutomu; Yagihashi Fujio; Hamada Yoshitaka; Asano Takeshi; Iwabuchi Motoaki; Nakagawa Hideo; Sasago Masaru

Archive | 2004

ANTI-REFLECTION FILM MATERIAL BASED ON SUBSTITUTED SILICON-CONTAINING COMPOUND, ANTI-REFLECTION FILM USING THE SAME AND PATTERNING METHOD USING THE SAME

Asano Takeshi; Iwabuchi Motoaki; Ogihara Tsutomu; Yagihashi Fujio

Archive | 2004

ANTI-REFLECTION FILM MATERIAL HAVING HIGH ETCHING SELECTIVITY TO RESIST, ANTI-REFLECTION FILM USING THE SAME AND PATTERNING METHOD USING THE SAME

Asano Takeshi; Iwabuchi Motoaki; Ogihara Tsutomu; Yagihashi Fujio

Archive | 2016

SILICON-CONTAINING POLYMER, SILICON-CONTAINING COMPOUND, COMPOSITION FOR FORMING A RESIST UNDER LAYER FILM, AND PATTERNING PROCESS

Ogihara Tsutomu; Watanabe Takeru; Maeda Kazunori

Archive | 2018

RESIST UNDERLAYER FILM COMPOSITION, PATTERNING PROCESS, METHOD FOR FORMING RESIST UNDERLAYER FILM, AND COMPOUND FOR RESIST UNDERLAYER FILM COMPOSITION

Watanabe Takeru; Kikuchi Rie; Kori Daisuke; Biyajima Yusuke; Ogihara Tsutomu

Archive | 2017

COMPOUND FOR FORMING ORGANIC FIRM COMPOSITION FOR FORMING ORGANIC FIRM METHOD FOR FORMING ORGANIC FIRM AND PATTERNING PROCESS

Kori Daisuke; Ogihara Tsutomu; Watanabe Takeru; Taneda Yoshinori; Kikuchi Rie

Archive | 2017

METHOD FOR FORMING ORGANIC FILM AND METHOD FOR MANUFACTURING SUBSTRATE FOR SEMICONDUCTOR APPARATUS

Ogihara Tsutomu; Kikuchi Rie

Archive | 2017

METHOD FOR REDUCING METAL OF SUGAR-ALCOHOL COMPOUND AND SUGAR-ALCOHOL COMPOUND

Nakahara Takayoshi; Watanabe Takeru; Tachibana Seiichiro; Ogihara Tsutomu

Archive | 2017

COMPOUND FOR FORMING ORGANIC FILM, COMPOSITION FOR FORMING ORGANIC FILM, METHOD FOR FORMING ORGANIC FILM, AND PATTERNING PROCESS

Kori Daisuke; Ogihara Tsutomu; Watanabe Takeru; Taneda Yoshinori; Maeda Kazunori

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Collaboration

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Kaneko Tatsushi

Shin-Etsu Chemical

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Shimizu Takaaki

Shin-Etsu Chemical

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Kinsho Takeshi

Shin-Etsu Chemical

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Nakashima Mutsuo

Shin-Etsu Chemical

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Iwabuchi Motoaki

Shin-Etsu Chemical

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Asano Takeshi

Shin-Etsu Chemical

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Kori Daisuke

Shin-Etsu Chemical

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Asakura Kazuyuki

Shin-Etsu Chemical

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Ueda Takafumi

Shin-Etsu Chemical

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Watanabe Takeru

Shin-Etsu Chemical

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