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Dive into the research topics where Olaf Kuehn is active.

Publication


Featured researches published by Olaf Kuehn.


Archive | 2010

XMR SENSORS WITH HIGH SHAPE ANISOTROPY

Juergen Zimmer; Klemens Pruegl; Olaf Kuehn; Andreas Strasser; Ralf-Rainer Schledz; Norbert Thyssen


Archive | 2003

Method of determining the endpoint of a planarization process

Peter Lahnor; Olaf Kuehn; Andreas Roemer; Alexander Simpson


Archive | 2012

XMR-Sensoren mit ausgeprägter Formanisotropie

Olaf Kuehn; Klemens Pruegl; Ralf Schledz; Andreas Dr. Straßer; Norbert Thyssen; Jürgen Zimmer


Archive | 2011

XMR sensors with pronounced anisotropy

Olaf Kuehn; Klemens Pruegl; Ralf Schledz; Straßer Andreas; Norbert Thyssen; Jürgen Zimmer


Archive | 2005

Circuit structure, is formed on a substrate by forming a metal structure on the substrate, applying an anti-reflection layer, forming a mask, etching and polishing

Chung-Min Lin; Uwe Kirbach; Olaf Kuehn


Archive | 2004

Verfahren zum Bestimmen des Endpunkts eines Planarisierungsprozesses und Vorrichtung zum Planarisieren eines Substrats A method for determining the end point of a planarization process and apparatus for planarizing a substrate

Olaf Kuehn; Alexander Simpson; Lahnor Peter; Andreas Roemer


Archive | 2004

Verfahren zum Planarisieren von Substraten A method for planarizing substrates

Olaf Kuehn; Peter Lahnor; Andreas Roemer; Alexander Simpson


Archive | 2004

Verfahren zum Bestimmen des Endprodukts eines Planarisierungsprozesses A method for determining the final product a planarization process

Olaf Kuehn; Peter Lahnor; Andreas Roemer; Alexander Simpson


Archive | 2004

A method for determining the end point of a planarization process and apparatus for planarizing a substrate

Olaf Kuehn; Alexander Simpson; Lahnor Peter; Andreas Roemer


Archive | 2004

A method for determining the final product a planarization process

Olaf Kuehn; Peter Lahnor; Andreas Roemer; Alexander Simpson

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