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Andreas Roemer

Infineon Technologies

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Publication

Featured researches published by Andreas Roemer.

Archive | 2003

Method of determining the endpoint of a planarization process

Peter Lahnor; Olaf Kuehn; Andreas Roemer; Alexander Simpson

Archive | 2002

Process and device for the abrasive machining of surfaces, in particular semiconductor wafers

Mark Hollatz; Andreas Roemer

Archive | 2004

Verfahren zum Bestimmen des Endpunkts eines Planarisierungsprozesses und Vorrichtung zum Planarisieren eines Substrats A method for determining the end point of a planarization process and apparatus for planarizing a substrate

Olaf Kuehn; Alexander Simpson; Lahnor Peter; Andreas Roemer

Archive | 2004

Verfahren zum Planarisieren von Substraten A method for planarizing substrates

Olaf Kuehn; Peter Lahnor; Andreas Roemer; Alexander Simpson

Archive | 2004

Verfahren zum Bestimmen des Endprodukts eines Planarisierungsprozesses A method for determining the final product a planarization process

Olaf Kuehn; Peter Lahnor; Andreas Roemer; Alexander Simpson

Archive | 2004

A method for determining the end point of a planarization process and apparatus for planarizing a substrate

Olaf Kuehn; Alexander Simpson; Lahnor Peter; Andreas Roemer

Archive | 2004

A method for determining the final product a planarization process

Olaf Kuehn; Peter Lahnor; Andreas Roemer; Alexander Simpson

Archive | 2004

A method for planarizing substrates

Olaf Kuehn; Peter Lahnor; Andreas Roemer; Alexander Simpson

Archive | 2003

METHOD OF PLANARIZING SUBSTRATES

Peter Lahnor; Olaf Kuehn; Andreas Roemer; Alexander Simpson

Archive | 2001

Verfahren zur abrasiven Bearbeitung von Oberflächen, insbesondere von Halbleiter-Wafern A method for the abrasive machining of surfaces, in particular semiconductor wafers

Andreas Roemer; Mark Hollatz

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Alexander Simpson

Infineon Technologies

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Olaf Kuehn

Infineon Technologies

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Peter Lahnor

Infineon Technologies

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Mark Hollatz

Infineon Technologies

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