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Patrick Leahey

Applied Materials

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Publication

Featured researches published by Patrick Leahey.

Archive | 1997

Treatment of etching chambers using activated cleaning gas

Gerald Zheyao Yin; Xue-Yu Qian; Patrick Leahey; Jonathan D. Mohn; Waiching Chow; Arthur Y. Chen; Zhiwen Sun; Brian K. Hatcher

Archive | 1997

Closed-loop dome thermal control apparatus for a semiconductor wafer processing system

Patrick Leahey; Jerry C. Chen; Richard E. Remington; Simon Yavelberg; Timothy D. Driscoll; Robert E. Ryan; Brian K. Hatcher; Rolf A. Guenther; Xueyu Qian

Archive | 2000

Plasma reactor with dynamic RF inductive and capacitive coupling control

Xue-Yu Qian; Zhiwen Sun; Maocheng Li; John Holland; Arthur H. Sato; Valentin N. Todorov; Patrick Leahey; Robert E. Ryan

Archive | 1998

Method for cleaning an etching chamber

Gerald Zheyao Yin; Xue-Yu Qian; Patrick Leahey; Jonathan D. Mohn; Waiching Chow; Arthur Y. Chen; Zhiwen Sun; Brian K. Hatcher

Archive | 2001

Icp window heater integrated with faraday shield or floating electrode between the source power coil and the icp window

Maocheng Li; John Holland; Valentin N. Todorov; Patrick Leahey; Robert P. Hartlage; Hoan Hai Nguyen

Archive | 2006

Bonded multi-layer RF window

Maocheng Li; John Holland; Patrick Leahey; Xue-Yu Qian; Michael Barnes; Jon Clinton; You Wang; Nianci Han

Archive | 2000

Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber

John Holland; Michael Barnes; Steve S. Y. Mak; Patrick Leahey; Jonathan D. Mohn

Archive | 2006

Fenetre rf multicouche soudee

Maocheng Li; John Holland; Patrick Leahey; Xue-Yu Qian; Michael Barnes; Jon Clinton; You Wang; Nianci Han

Archive | 2003

Recent Trends in Silicon Etching: Controlled Flexibility

Thorsten Lill; Meihua Shen; Shashank C. Deshmukh; David Mui; Patrick Leahey; John L. Holland; Alex Paterson; Podlesnik Dragan

Archive | 2003

Design and Development of a Novel Dual Gas Delivery System in a Plasma Reactor

Nicolas Gani; Meihua Shen; Yan Chen Du; Wilfred Pau; John L. Holland; Theodoros Panagopoulus; Valentin N. Todorow; Patrick Leahey; Hoan K. Nguyen

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Collaboration

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Xue-Yu Qian

Applied Materials

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John Holland

Applied Materials

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Brian K. Hatcher

Applied Materials

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Maocheng Li

Applied Materials

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Jonathan D. Mohn

Applied Materials

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Michael Barnes

Lam Research

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Robert E. Ryan

Applied Materials

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Zhiwen Sun

Applied Materials

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Arthur Y. Chen

Applied Materials

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Gerald Zheyao Yin

Applied Materials

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