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Paul Jacobson

ASM International

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Publication

Featured researches published by Paul Jacobson.

Archive | 2006

Selective deposition of silicon-containing films

Matthias Bauer; Chantal J. Arena; Ronald Bertram; Pierre Tomasini; Nyles Cody; Paul D. Brabant; Joe P. Italiano; Paul Jacobson; Keith Doran Weeks

Archive | 1999

Wafer carrier and method for handling of wafers with minimal contact

Paul R. Carr; Paul Jacobson; James F. Kusbel; James S. Roundy; Ravinder Aggarwal; Ivo Raaijmakers

Archive | 2006

System for control of gas injectors

Michael A. Todd; Keith Doran Weeks; Paul Jacobson

Archive | 1999

Method for handling of wafers with minimal contact

Paul R. Carr; Paul Jacobson; James F. Kusbel; James S. Roundy; Ravinder Aggarwal; Ivo Raaijmakers; Rod Lenz; Nilesh Rajbharti

Archive | 2007

REACTOR WITH SMALL LINEAR LAMPS FOR LOCALIZED HEAT CONTROL AND IMPROVED TEMPERATURE UNIFORMITY

Ravinder Aggarwal; Jeroen Stoutjesdijk; Paul Jacobson

Archive | 2006

Purifier for chemical reactor

Paul D. Brabant; Paul Jacobson; Keith Doran Weeks

Archive | 2003

High temperature drop-off of a substrate

Paul Jacobson; Ivo Raaijmakers; Ravinder Aggarwal; Robert C. Haro

Archive | 2011

Substrate temperature uniformity during rapid substrate heating

Michael W. Halpin; Paul Jacobson

Archive | 2002

Light scattering process chamber walls

Paul Jacobson; Ivo Raaijmakers

Archive | 2006

Batch reaction chamber employing separate zones for radiant heating and resistive heating

Paul D. Brabant; Paul Jacobson

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Collaboration

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Paul D. Brabant

ASM International

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Ivo Raaijmakers

ASM International

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Keith Doran Weeks

ASM International

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Ravinder Aggarwal

ASM International

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James F. Kusbel

ASM International

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James S. Roundy

ASM International

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Joe P. Italiano

ASM International

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Matthias Bauer

ASM International

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Nyles Cody

ASM International

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Paul R. Carr

ASM International

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