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Ravinder Aggarwal

ASM International

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Publication

Featured researches published by Ravinder Aggarwal.

Archive | 1989

High throughput multi station processor for multiple single wafers

H. Peter W. Hey; William A. Mazak; Ravinder Aggarwal; John H. Curtin

Archive | 1999

Multi-stage single-drive FOUP door system

Ravinder Aggarwal; Ronald R. Stevens

Archive | 2003

Front opening unified pod

Ravinder Aggarwal

Archive | 2003

System for the improved handling of wafers within a process tool

Ravinder Aggarwal; James B. Kusbel; James A. Alexander

Archive | 2009

Substrate reactor with adjustable injectors for mixing gases within reaction chamber

Ravinder Aggarwal; Rand Conner; John T. DiSanto; James A. Alexander

Archive | 1990

Method for processing wafers in a multi station common chamber reactor

H. Peter W. Hey; William A. Mazak; Ravinder Aggarwal; John H. Curtin; Paul B. Brown; Joe R. Smith

Archive | 2005

Substrate support system for reduced autodoping and backside deposition

Matt Goodman; Jereon Stoutyesdijk; Ravinder Aggarwal; Mike Halpin; Tony J. Keeton; Mark R. Hawkins; Lee Haen; Armand P. Ferro; Paul D. Brabant; Robert M. Vyne; Gregory M. Bartlett; Joe P. Italiano; Bob Haro

Archive | 2004

Wafer holder with peripheral lift ring

Ravinder Aggarwal; Tony J. Keeton; Matthew G. Goodman

Archive | 2001

Docking cart with integrated load port

Ravinder Aggarwal

Archive | 1999

Wafer carrier and method for handling of wafers with minimal contact

Paul R. Carr; Paul Jacobson; James F. Kusbel; James S. Roundy; Ravinder Aggarwal; Ivo Raaijmakers

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Jeroen Stoutjesdijk

ASM International

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H. Peter W. Hey

ASM International

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Ivo Raaijmakers

ASM International

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James F. Kusbel

ASM International

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John H. Curtin

ASM International

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William A. Mazak

ASM International

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Joe R. Smith

ASM International

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Mark R. Hawkins

ASM International

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Matthew G. Goodman

ASM International

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Paul B. Brown

ASM International

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