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Paul Wirth

Applied Materials

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Archive | 2003

Single workpiece processing system

Kyle M. Hanson; Paul Wirth; Steven L. Peace; Jon Kuntz; Scott A. Bruner

Archive | 2006

Method and apparatus for thermally processing microelectronic workpieces

Paul Wirth; Jeffry Alan Davis

Archive | 2005

Modular tool unit for processing of microfeature workpieces

Randy A. Harris; Paul Wirth

Archive | 2005

Modular tool unit for processing microelectronic workpieces

Paul Wirth; Jeffry Alan Davis; Randy A. Harris

Archive | 2007

High throughput semiconductor wafer processing

Randy A. Harris; Steve L. Eudy; Paul Wirth

Archive | 2014

Microelectronic substrate electro processing system

Robert B. Moore; David Silvetti; Paul Wirth; Randy A. Harris

Archive | 2006

End-effectors and associated control and guidance systems and methods

Randy A. Harris; Daniel J. Woodruff; Paul Wirth; David P. Mattson; James J. Erickson

Archive | 2017

ROBOT ASSEMBLIES, SUBSTRATE PROCESSING APPARATUS, AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING

Paul Wirth

Archive | 2013

Anneal module for semiconductor wafers

Vincent Steffan Francischetti; Gregory J. Wilson; Kyle M. Hanson; Paul Wirth; Robert B. Moore

Archive | 2007

Workpiece loading system

Steve L. Eudy; Randy A. Harris; Paul Wirth

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Randy A. Harris

Applied Materials

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Robert B. Moore

Applied Materials

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David Silvetti

Applied Materials

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Kyle M. Hanson

Applied Materials

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Gregory J. Wilson

Applied Materials

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Vincent Steffan Francischetti

Applied Materials

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Daniel J. Woodruff

Applied Materials

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