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Dive into the research topics where Randy A. Harris is active.

Publication


Featured researches published by Randy A. Harris.


Archive | 2001

Adaptable electrochemical processing chamber

Daniel J. Woodruff; Kyle M. Hanson; Steve L. Eudy; Curtis A. Weber; Randy A. Harris


Archive | 2001

Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces

Daniel J. Woodruff; Randy A. Harris


Archive | 2001

Integrated tools with transfer devices for handling microelectronic workpieces

Daniel J. Woodruff; Randy A. Harris


Archive | 2001

Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces

Kyle M. Hanson; Steve L. Eudy; Thomas L. Ritzdorf; Gregory J. Wilson; Daniel J. Woodruff; Randy A. Harris; Curtis A. Weber; Tim McGlenn; Timothy A. Anderson; Daniel P. Bexten


Archive | 2002

End-effectors for handling microelectronic workpieces

Daniel J. Woodruff; Thomas H. Oberlitner; Randy A. Harris; James J. Erickson; Douglas W. Carr


Archive | 2002

Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces

Daniel J. Woodruff; Randy A. Harris


Archive | 2003

Apparatus with processing stations for manually and automatically processing microelectronic workpieces

Randy A. Harris; Daniel J. Woodruff


Archive | 2004

Wet chemical processing chambers for processing microfeature workpieces

Kyle M. Hanson; Kert L. Dolechek; Paul R. McHugh; Gregory J. Wilson; Jeffry Alan Davis; Randy A. Harris


Archive | 2002

Apparatus for manually and automatically processing microelectronic workpieces

Randy A. Harris; Daniel J. Woodruff


Archive | 2004

Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems

Daniel J. Woodruff; Jeffry Alan Davis; Randy A. Harris; David P. Mattson; James J. Erickson; Matthew C. Egloff

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