Peter Zagwijn
ASM International
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Publication
Featured researches published by Peter Zagwijn.
european solid state device research conference | 2008
J. De Vos; D. Wellekens; I. Debusschere; J. Van Houdt; S.R.A. Van Aerde; Pamela René Fischer; Peter Zagwijn
When scaling down Floating Gate (FG) based NAND Flash to the 40 nm-technology node and beyond, the main challenge is the electrical interference between adjacent cells. This can be drastically reduced by thinning the FG below 20 nm. For the 43 nm-node, 60 nm thick FG layers are already used [1]. In this paper we present, based on ASMpsilas Silcorereg precursor for silicon deposition, a proof-of-concept that scaling down the floating gate thickness to 15 nm has no impact on the memory operation.
Surface & Coatings Technology | 2007
Ernst Hendrik August Granneman; Pamela R. Fischer; Dieter Pierreux; Herbert Terhorst; Peter Zagwijn
Archive | 2007
Suvi Haukka; Tanja Claasen; Peter Zagwijn
Archive | 2002
Theodorus Gerardus Maria Oosterlaken; Peter Zagwijn
210th ECS Meeting | 2006
Pamela R. Fischer; Steven R. A. Van Aerde; Ed Oosterlaken; Bart Bozon; Peter Zagwijn; Matthias Bauer; Min Yan; Wilco Verweij
Archive | 2008
Dieter Pierreux; Bert Jongbloed; Peter Zagwijn
Archive | 2009
Peter Zagwijn; Hyung-Sang Park; Stijn De Vusser
Meeting Abstracts | 2008
Pamela R. Fischer; Dieter Pierreux; Olivier Rouault; Jacky Sirugue; Peter Zagwijn; Eva Tois; Suvi Haukka
Archive | 2006
Peter Zagwijn; Theodorus Gerardus Maria Oosterlaken; Steven R. A. Van Aerde; Pamela René Fischer
Archive | 2013
Werner Knaepen; Bert Jongbloed; Dieter Pierreux; Peter Zagwijn; Hessel Sprey; Cornelius A. van der Jeugd; Marinus J. De Blank; Robin Roelofs; Qi Xie; Jan Willem Maes
