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Dive into the research topics where Philip H. Campbell is active.

Publication


Featured researches published by Philip H. Campbell.


Archive | 2004

Chemical vapor deposition method

Allen P. Mardian; Philip H. Campbell; Craig M. Carpenter; Randy W. Mercil; Sujit Sharan


Archive | 2002

Apparatus and process of improving atomic layer deposition chamber performance

Philip H. Campbell; David J. Kubista


Archive | 2001

Chemical vapor deposition apparatuses and deposition methods

Craig M. Carpenter; Ross S. Dando; Philip H. Campbell; Allen P. Mardian; Jeff N. Fuss; Randy W. Mercil


Archive | 2001

CVD apparatuses and methods of forming a layer over a semiconductor substrate

Philip H. Campbell; Craig M. Carpenter; Ross S. Dando; Kevin T. Hamer


Archive | 2004

Deposition chamber surface enhancement and resulting deposition chambers

Garo J. Derderian; Gurtej S. Sandhu; Ross S. Dando; Craig M. Carpenter; Philip H. Campbell


Archive | 2006

Laser assisted material deposition

Ross S. Dando; Dan Gealy; Craig M. Carpenter; Philip H. Campbell; Allen P. Mardian


Archive | 2002

Deposition apparatuses configured for utilizing phased microwave radiation

Craig M. Carpenter; Ross S. Dando; Philip H. Campbell


Archive | 2001

Plasma enhanced chemical vapor deposition process

Philip H. Campbell; Sujit Sharan; Craig M. Carpenter; Allen P. Mardian


Archive | 2002

Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor

Craig M. Carpenter; Ross S. Dando; Allen P. Mardian; Kevin T. Hamer; Raynald B. Cantin; Philip H. Campbell; Kimberly R. Tschepen; Randy W. Mercil


Archive | 2000

Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process

Philip H. Campbell; Sujit Sharan; Craig M. Carpenter; Allen P. Mardian

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