Piotr Prokaryn

Fabrication of MOS - Compatible Ion - Sensitive Devices for Water Pollution Monitoring (Warmer)

Preparation of pH-sensors and structures ready for ion-sensitive coating for in-line water pollution monitoring was the aim of the paper. Au and AgCl electrodes with Au backside contacts were developed using mono-Si substrates. Sequence of manufacturing process was presented. Device series resistance and potentiometric response were positively tested. ISFET pH sensors were manufactured and fully characterized. They were suitable for current use and found to be a basis for further industrialization of the sensor fabrication process.

16-element photodiode array for the angular microdeflection detector and for stabilization of a laser radiation direction

In this paper, the design and technology of two types of 16-element photodiode arrays is described. The arrays were developed by the ITE and are to be used in detection of microdeflection of laser radiation at the Institute of Metrology and Biomedical Engineering in the Faculty of Mechatronics of Warsaw University of Technology. The electrical and photoelectrical parameters of the arrays are presented.

Polymer microfluidic bioreactor fabrication by means of gray scale lithography technique

In this paper we present a new method of polymer microfluidic bioreactor fabrication by means of a gray scale lithography technique. As a result of the gray scale lithography process the 3D model of the bioreactor is defined in photoresist. The obtained model serves as a sacrificial layer for the subsequent transfer of the 3D shape into the polymer material. The proposed method allows simultaneous definition of both the overall bioreactor geometry and the multi steps cell traps in a single photolithography step. Such microfluidic structure can be used for sorting cells based on their size. The developed solution significantly simplifies the production technology and reduces its costs in comparison to standard photolithography techniques.

Gravimetric measurements with use of a cantilever for controlling of electrochemical deposition processes

In this paper we describe the method for monitoring the progress of electrochemical deposition process. The procedure allows to control the deposition of metals as well as conductive polymers on metallic seed layer. The method is particularly useful to very thin layers (1-10 nm) of deposited medium which mechanical or optical methods are troublesome for. In this method deposit is grown on the target and on the test silicon micro-cantilever with a metal pad. Galvanic deposition on the cantilever causes the change of its mass and consequently the change of its resonance frequency. Changes of the frequency is measured with laser vibro-meter then the layer thicknesses can be estimated basing on the cantilever calibration curve. Applying this method for controlling of gold deposition on platinum seed layer, for improving the properties of the biochemical sensors, is described in this paper.

Qucs-based development of an energy harvester compact model

In the paper a simple compact model of a transfer of a mechanical energy into an electrical energy is presented. The mechanical energy is stored in a vibrating bimetallic membrane with an electret layer. The membrane vibrations are forced by a set-up consisting of a cold and hot surfaces. During the vibrations this set-up acts as a variable capacitor with one of the electrodes being constantly charged. The charge stored on the other plate of this capacitor varies periodically and is transferred to the external storage capacitor via a simple Graetz circuit. Acompact model of this mechanism has been derived and implemented in an open-source Quite Universal Circuit Simulator (Qucs) program as a circuit including a specific Equation-Defined Device component. The simulation data have been compared with experimental ones, demonstrating promising features of the proposed approach.

Thermal energy harvesters with piezoelectric or electrostatic transducer

This paper describes the idea of the energy harvester which converts thermal gradient present in environment into electricity. Two kinds of such devices are proposed and their prototypes are shown and discussed. The main parts of harvesters are bimetallic spring, piezoelectric transducer or electrostatic transducer with electret. The applied piezomembrane was commercial available product but electrets was made by authors. In the paper a fabrication procedure of electrets formed by the corona discharge process is described. Devices were compared in terms of generated power, charging current, and the voltage across a storage capacitor.

The novel method of adhesive bonding in technology of semiconductor fluidic systems

The subject of this paper is to describe the novel method of substrates bonding applied in MEMS technology. This method gives a possibility of carrying out bonding processes in standard devices for wafer bonding. It can be applied to chemical, high voltage or high temperature sensitive surfaces. It can be used for bonding substrates with deep etching area with sharp edges and covered with films characterized by low adhesion to the classical materials exploited for photolithography. The main idea of the method is based on two various polymer materials usage. The first material enables to define accurate borders of bonding area, whereas the other guarantees suitable parameters of bonding: firstly the exact adhesion and a stable join and secondly, desirable electrical or thermal parameters.