Po-Hsien Lai

A Novel

On the basis of a Pt/In0.52Al0.48As metal-semiconductor structure, a novel hydrogen sensor is fabricated and demonstrated. The studied Pt/In0.52Al0.48As Schottky diode-type hydrogen sensor exhibits significant sensing performance including high relative sensitivity ratio of about 2600% (under the 1% H2/air gas and VR=-0.5 V at 30 degC), large current variation of 310 muA (under the 1% H2/air gas and VR=-5 V at 200 degC), widespread reverse-voltage regime (0~-5 V), stable hydrogen-sensing current-voltage (I-V) curves, and fast transient response time of 1.5 s. The calculated Schottky barrier-height change and series-resistance variation, from the thermionic-emission model and Norde method, are 87.0 meV and 288 Omega, respectively (under the 1% H2/air gas at 30 degC). The hydrogen concentrations and operating temperatures tested in this letter are in the range of 15 ppm-1% H2/air and 30 degC-250 degC, respectively. Based on the excellent integration compatibility with InP-based electronic devices, the studied device provides the potentiality in high-performance sensor-array applications

\hbox{Pt/In}_{0.52}\hbox{Al}_{0.48}\hbox{As}

The influences of (NH/sub 4/)/sub 2/S/sub x/ treatment on an AlGaAs/InGaAs/GaAs pseudomorphic high electron mobility transistor (PHEMT) are studied and demonstrated. Upon the sulfur passivation, the studied device exhibits better temperature-dependent dc and microwave characteristics. Experimentally, for a 1/spl times/100 /spl mu/m/sup 2/ gate/dimension PHEMT with sulfur passivation, the higher gate/drain breakdown voltage of 36.4 (21.5) V, higher turn-on voltage of 0.994 (0.69) V, lower gate leakage current of 0.6 (571) /spl mu/A/mm at V/sub GD/=-22 V, improved threshold voltage of -1.62 (-1.71) V, higher maximum transconductance of 240 (211) mS/mm with 348 (242) mA/mm broad operating regime (>0.9g/sub m,max/), and lower output conductance of 0.51 (0.53) mS/mm are obtained, respectively, at 300 (510) K. The corresponding unity current gain cutoff frequency f/sub T/ (maximum oscillation frequency f/sub max/) are 22.2 (87.9) and 19.5 (59.3) GHz at 250 and 400 K, respectively, with considerably broad operating regimes (>0.8f/sub T/,f/sub max/) larger than 455 mA/mm. Moreover, the relatively lower variations of device performances over wide temperature range (300/spl sim/510 K) are observed.

Schottky Diode-Type Hydrogen Sensor

A new and interesting field-effect resistive hydrogen sensor, based on the current-voltage characteristics in the linear region of an AlGaAs-based pseudomorphic high-electron-mobility transistor structure and high hydrogen sensitivity of a palladium (Pd) metal, is studied and demonstrated. An oxide layer between Pd and AlGaAs is used to increase the number of hydrogen adsorption sites, and improve hydrogen detection sensitivity. A simple model is employed to interpret the hydrogen adsorption and sensing mechanism. The dissociation of H2, diffusion of H atoms and formation of a dipolar layer cause a significant decrease in channel resistance. In comparison with other resistor-type hydrogen sensors, the studied device demonstrates the considerable advantages of lower detection limit (< 4.3 ppm H2 /air) and higher sensitivity (24.7% in 9970 ppm H2/air) at room temperature. Also, the studied device exhibits a smaller resistance (several 10 Omega) and a smaller operating voltage (les 0.3 V) which are superior to other resistive sensors with typically larger resistances (ranged from kiloohms to megaohms) and larger voltages (ges 1 V). Consequentially, the studied resistive sensor provides the promise for low-power GaAs-based electronic and microelectromechanical-system applications

Influences of sulfur passivation on temperature-dependent characteristics of an AlGaAs/InGaAs/GaAs PHEMT

By combining the advantages of a catalytic metal Pd with a high-performance AlGaAs/InGaAs/GaAs pseudomorphic high-electron-mobility transistor (PHEMT), an interesting hydrogen sensor is fabricated and demonstrated. For the proposed device, a 50 A undoped GaAs cap layer is grown to prevent the Al0.24Ga0.76As Schottky layer from oxidizing and to reduce the Fermi level pinning effect. Experimentally, a high sensitivity SJ value of 275.8 µA/mmppm H2/air can be obtained at a hydrogen concentration of 14 ppm H2/air. Even at a very low hydrogen concentration (≤4.3 ppm H2/air) at 30°C, a significant current variation can be observed. In addition, a fast transient response is found. The adsorption time constant τa becomes only 2 s as the operating temperature is elevated to 160°C. Therefore, the proposed device reveals the promise for high-performance hydrogen sensor applications.

Study of a New Field-Effect Resistive Hydrogen Sensor Based on a Pd/Oxide/AlGaAs Transistor

Conformal passivation on an InGaP/GaAs HBT with significant reduction in the base surface-recombination effect is demonstrated. Not only dc behaviors but also RF performances are remarkably improved compared with the conventional emitter-ledge structure. Based on the conformal passivation, i.e., the base surface is covered by the depleted InGaP ledge structure and sulfur ((NH4)2Sx ) treatment, lower base surface-recombination current density, lower specific contact resistance, lower sheet resistance, higher current gain, higher collector current, and higher maximum oscillation frequency are obtained

AlGaAs/InGaAs/GaAs Transistor-Based Hydrogen Sensing Device Grown by Metal Organic Chemical Vapor Deposition

The influence of emitter ledge length on the performance of InGaP∕GaAs heterojunction bipolar transistors is comprehensively investigated. Due to the band-bending effect at the intersection of the emitter ledge edge with the exposed base surface, an undesired potential saddle point is formed. Moreover, emitter ledge passivations that are longer or shorter than an optimal length result in the deterioration of device performance. Based on the theoretical analysis and experimental results, the surface recombination effect of the device with an emitter ledge length of 0.8μm is negligible compared with the unpassivated device. Also, the device with the emitter ledge length of 0.8μm shows nearly the best dc characteristics and acceptable rf performance. Therefore, the optimum emitter ledge length in this study is near 0.8μm.

Further Suppression of Surface-Recombination of an InGaP/GaAs HBT by Conformal Passivation

The temperature-dependent dc characteristics of InGaP∕GaAs heterojunction bipolar transistors with and without full sulfur passivation are systematically studied and demonstrated. The studied device with full sulfur passivation shows lower specific contact resistance ρC, lower sheet resistance Rsh, lower collector-emitter offset voltage ΔVCE, and higher dc gain βF than devices without sulfur passivation. The device with full sulfur passivation also exhibits better rf performance. In addition, the studied device with full sulfur treatment shows lower temperature variation coefficients of ρC,Rsh,ΔVCE, and βF. Thus, the device with sulfur treatment presents relatively temperature-independent characteristics that can extend the transistor action to higher temperature regimes.

Comprehensive investigation on emitter ledge length of InGaP∕GaAs heterojunction bipolar transistors

A new camel-gate field effect transistor (CAMFET) with a composite channel structure has been fabricated and demonstrated. Due to the n+-InGaP/p+-InGaP/GaAs camel gate and InGaAs/GaAs composite channel structures employed, good device performance is observed. Experimentally, at room temperature, a gate-drain breakdown voltage over 15 V, maximum transconductance gm,max of 111.5 mS mm?1, voltage gain AV of 93.4, unity current gain cut-off frequency fT of 16.2 GHz and maximum oscillation frequency unity fmax of 24.2 GHz are obtained simultaneously for a 1 ? 100 ?m2 device. The studied device also shows good properties in a higher temperature regime. Moreover, the studied device exhibits relatively negligible temperature-dependent characteristics over the operating temperature range from 300 to 420 K. Therefore, the studied device provides promise for high-temperature and high-performance microwave electronic applications.

Improved dc and microwave performance of heterojunction bipolar transistors by full sulfur passivation

Comprehensive and systematical comparisons of temperature-dependent characteristics of In0.42Al0.58As/In0.46Ga0.54As metamorphic heterostructure field-effect transistors (MHFETs) with various Schottky gate alloys are studied and demonstrated. The influence of the Schottky barrier height on the impact ionization effect and its associated device performance are also investigated. Better dc and microwave characteristics can be obtained by using the higher metal work function of gate alloys, e.g., Ti/Au, Ni/Au and Pt/Au. In particular, the device with a Pt/Au gate alloy shows the superior device performance in breakdown voltage, threshold voltage, maximum transconductance, output conductance, voltage gain and microwave properties at room temperature. Furthermore, the device with a Ti/Au gate alloy shows the thermally stable performance in threshold voltage, maximum transconductance, output conductance and voltage gain over a wide operating temperature range (from 300 to 510 K). Consequently, the studied devices with appropriate Schottky gate contacts provide the promise for high-speed and high-temperature electronic applications.

Characteristics of a new camel-gate field effect transistor (CAMFET) with a composite channel structure

Comprehensive studies of temperature-dependent gate-metal-related impact ionization in metamorphic high electron mobility transistors (MHEMTs) are demonstrated. It is known that, from experimental results, the electric field and temperature dependences of impact ionization mechanisms in MHEMT’s operation are dominated by the ionization threshold energy and hot electron population. The peak impact ionization-induced gate current could be substantially decreased by the presence of specific gate contact with a higher Schottky barrier height. Therefore, the suppressions of bell-shaped behavior and related impact ionization effect are observed by using the appropriate Schottky gate contacts.