Yan-Ying Tsai

A Novel

On the basis of a Pt/In0.52Al0.48As metal-semiconductor structure, a novel hydrogen sensor is fabricated and demonstrated. The studied Pt/In0.52Al0.48As Schottky diode-type hydrogen sensor exhibits significant sensing performance including high relative sensitivity ratio of about 2600% (under the 1% H2/air gas and VR=-0.5 V at 30 degC), large current variation of 310 muA (under the 1% H2/air gas and VR=-5 V at 200 degC), widespread reverse-voltage regime (0~-5 V), stable hydrogen-sensing current-voltage (I-V) curves, and fast transient response time of 1.5 s. The calculated Schottky barrier-height change and series-resistance variation, from the thermionic-emission model and Norde method, are 87.0 meV and 288 Omega, respectively (under the 1% H2/air gas at 30 degC). The hydrogen concentrations and operating temperatures tested in this letter are in the range of 15 ppm-1% H2/air and 30 degC-250 degC, respectively. Based on the excellent integration compatibility with InP-based electronic devices, the studied device provides the potentiality in high-performance sensor-array applications

\hbox{Pt/In}_{0.52}\hbox{Al}_{0.48}\hbox{As}

The influences of (NH/sub 4/)/sub 2/S/sub x/ treatment on an AlGaAs/InGaAs/GaAs pseudomorphic high electron mobility transistor (PHEMT) are studied and demonstrated. Upon the sulfur passivation, the studied device exhibits better temperature-dependent dc and microwave characteristics. Experimentally, for a 1/spl times/100 /spl mu/m/sup 2/ gate/dimension PHEMT with sulfur passivation, the higher gate/drain breakdown voltage of 36.4 (21.5) V, higher turn-on voltage of 0.994 (0.69) V, lower gate leakage current of 0.6 (571) /spl mu/A/mm at V/sub GD/=-22 V, improved threshold voltage of -1.62 (-1.71) V, higher maximum transconductance of 240 (211) mS/mm with 348 (242) mA/mm broad operating regime (>0.9g/sub m,max/), and lower output conductance of 0.51 (0.53) mS/mm are obtained, respectively, at 300 (510) K. The corresponding unity current gain cutoff frequency f/sub T/ (maximum oscillation frequency f/sub max/) are 22.2 (87.9) and 19.5 (59.3) GHz at 250 and 400 K, respectively, with considerably broad operating regimes (>0.8f/sub T/,f/sub max/) larger than 455 mA/mm. Moreover, the relatively lower variations of device performances over wide temperature range (300/spl sim/510 K) are observed.

Schottky Diode-Type Hydrogen Sensor

An interesting hydrogen sensing Pd/InGaP metal-semiconductor (MS) Schottky diode has been fabricated and studied. Both the steady state and the transient condition of the hydrogen adsorption process are investigated. Even at room temperature, an extremely low hydrogen concentration of 15 ppm H2/air can be detected. In addition, the wide operating temperature range of 250 K of the studied Pd/InGaP hydrogen sensor is found. From experimental results, it is shown that the variation of Schottky barrier height increases with the increase of the operating temperature and hydrogen concentration. As the operation temperature is elevated, the water formation effect is also studied in the quasi-equilibrium region under the transient condition.

Influences of sulfur passivation on temperature-dependent characteristics of an AlGaAs/InGaAs/GaAs PHEMT

A new and interesting field-effect resistive hydrogen sensor, based on the current-voltage characteristics in the linear region of an AlGaAs-based pseudomorphic high-electron-mobility transistor structure and high hydrogen sensitivity of a palladium (Pd) metal, is studied and demonstrated. An oxide layer between Pd and AlGaAs is used to increase the number of hydrogen adsorption sites, and improve hydrogen detection sensitivity. A simple model is employed to interpret the hydrogen adsorption and sensing mechanism. The dissociation of H2, diffusion of H atoms and formation of a dipolar layer cause a significant decrease in channel resistance. In comparison with other resistor-type hydrogen sensors, the studied device demonstrates the considerable advantages of lower detection limit (< 4.3 ppm H2 /air) and higher sensitivity (24.7% in 9970 ppm H2/air) at room temperature. Also, the studied device exhibits a smaller resistance (several 10 Omega) and a smaller operating voltage (les 0.3 V) which are superior to other resistive sensors with typically larger resistances (ranged from kiloohms to megaohms) and larger voltages (ges 1 V). Consequentially, the studied resistive sensor provides the promise for low-power GaAs-based electronic and microelectromechanical-system applications

A hydrogen sensing Pd/InGaP metal-semiconductor (MS) Schottky diode hydrogen sensor

The interesting hydrogen sensing performances of a Pt-oxide-AlGaAs (MOS) high electron mobility transistor (HEMT) are studied and demonstrated. The effects of hydrogen adsorption on device performances such as the threshold voltage shift ΔVth, drain saturation current variation ΔIDS, and transient response are presented. ΔVth and ΔIDS decreased with increasing operating temperature. This suggests that, at higher temperature, less hydrogen atoms diffuse through the Pt bulk and reach the interface between the Pt metal and oxide layer resulting from the relatively faster formation rate of hydroxyl on the Pt surface. The response curves of the studied Pt-AlGaAs MOS HEMT show various profiles at different temperatures. The influences of hydrogen concentration and temperature on the interface sites occupied by adsorbed atoms are also studied.

Study of a New Field-Effect Resistive Hydrogen Sensor Based on a Pd/Oxide/AlGaAs Transistor

An interesting hydrogen sensor based on an Al/sub 0.24/Ga/sub 0.76/As Schottky barrier high-electron mobility transistor with a catalytic Pd metal/oxide/semiconductor is fabricated and demonstrated. In comparison with traditional Schottky diodes or capacitance-voltage type hydrogen sensors, the studied device exhibits larger current variation, lower hydrogen detection limit, and shorter transient hydrogen response time. Besides, good hydrogen-sensing properties, such as significant drain current change, threshold voltage shift, and transconductance change of transistor behaviors, are obtained. Therefore, the studied device provides the promise for high-performance solid-state hydrogen sensors, optoelectronic integrated circuits, and microelectromechanical system applications.

Hydrogen sensing properties of a Pt‐oxide‐Al0.24Ga0.76As high-electron-mobility transistor

By combining the advantages of a catalytic metal Pd with a high-performance AlGaAs/InGaAs/GaAs pseudomorphic high-electron-mobility transistor (PHEMT), an interesting hydrogen sensor is fabricated and demonstrated. For the proposed device, a 50 A undoped GaAs cap layer is grown to prevent the Al0.24Ga0.76As Schottky layer from oxidizing and to reduce the Fermi level pinning effect. Experimentally, a high sensitivity SJ value of 275.8 µA/mmppm H2/air can be obtained at a hydrogen concentration of 14 ppm H2/air. Even at a very low hydrogen concentration (≤4.3 ppm H2/air) at 30°C, a significant current variation can be observed. In addition, a fast transient response is found. The adsorption time constant τa becomes only 2 s as the operating temperature is elevated to 160°C. Therefore, the proposed device reveals the promise for high-performance hydrogen sensor applications.

Pd-oxide- Al/sub 0.24/Ga/sub 0.76/As (MOS) high electron mobility transistor (HEMT)-based hydrogen sensor

The interesting hydrogen sensing properties of a Pt-oxide-GaN metal-oxide-semiconductor-type Schottky diode are comprehensively studied and demonstrated. In the hydrogen-containing environment, the shift in current-voltage curves and decrease in turn-on voltage are found to be caused by the lowering of Schottky barrier height. Also, the corresponding series resistance is decreased from 191.8 (in air) to 155.3 Ω (for a 9970 ppm H2/air gas) at 30 °C. As the carrier gas is replaced by a nitrogen gas, a significant variation of 0.32 V and 19.56 Ω in the turn-on voltage Von and series resistance Rs values, respectively, is obtained at 30 °C, even at an extremely low hydrogen concentration of 4.3 ppm H2/N2. Since the oxygen atoms will be dissolved on the Pt metal surface and react with hydrogen atoms by the formation of hydroxyl and water, the number of adsorbed hydrogen atoms on the Pt surface is reduced. Moreover, the shorter response time constant and the larger initial rate of current density variation are ...

AlGaAs/InGaAs/GaAs Transistor-Based Hydrogen Sensing Device Grown by Metal Organic Chemical Vapor Deposition

The influence of emitter ledge length on the performance of InGaP∕GaAs heterojunction bipolar transistors is comprehensively investigated. Due to the band-bending effect at the intersection of the emitter ledge edge with the exposed base surface, an undesired potential saddle point is formed. Moreover, emitter ledge passivations that are longer or shorter than an optimal length result in the deterioration of device performance. Based on the theoretical analysis and experimental results, the surface recombination effect of the device with an emitter ledge length of 0.8μm is negligible compared with the unpassivated device. Also, the device with the emitter ledge length of 0.8μm shows nearly the best dc characteristics and acceptable rf performance. Therefore, the optimum emitter ledge length in this study is near 0.8μm.

Hydrogen sensing properties of a Pt-oxide-GaN Schottky diode

Comprehensive and systematical comparisons of temperature-dependent characteristics of In0.42Al0.58As/In0.46Ga0.54As metamorphic heterostructure field-effect transistors (MHFETs) with various Schottky gate alloys are studied and demonstrated. The influence of the Schottky barrier height on the impact ionization effect and its associated device performance are also investigated. Better dc and microwave characteristics can be obtained by using the higher metal work function of gate alloys, e.g., Ti/Au, Ni/Au and Pt/Au. In particular, the device with a Pt/Au gate alloy shows the superior device performance in breakdown voltage, threshold voltage, maximum transconductance, output conductance, voltage gain and microwave properties at room temperature. Furthermore, the device with a Ti/Au gate alloy shows the thermally stable performance in threshold voltage, maximum transconductance, output conductance and voltage gain over a wide operating temperature range (from 300 to 510 K). Consequently, the studied devices with appropriate Schottky gate contacts provide the promise for high-speed and high-temperature electronic applications.