晴夫 砂川

Iii-v compound semiconductor film and growth method, gan system semiconductor film and its formation, gan system semiconductor stacked structure and its formation, and gan system semiconductor element and its manufacture

Ground substrate for crystal growth and method of producing substrate using the same

GaN CRYSTAL FILM, AND III-FAMILY ELEMENT NITRIDE SEMICONDUCTOR WAFER AND ITS MANUFACTURE

Group-iii nitride independent substrate, semiconductor device using the same, and method for manufacturing them

MANUFACTURE OF III-V NITRIDE COMPOUND SEMICONDUCTOR

METHOD FOR GROWING GROUP III-V COMPOUND SEMICONDUCTOR AND MANUFACTURE OF SEMICONDUCTOR LIGHT EMITTING DEVICE USING THE METHOD

Gab SEMICONDUCTOR ELEMENT AND MANUFACTURING METHOD

Method of manufacturing nitride-based semiconductor layer

Group iii nitride semiconductor substrate and method for producing the same

GROWTH METHOD OF GaN SEMICONDUCTOR LAYER, SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD USING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE