Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Qingyun Chen.
Proceedings of SPIE, the International Society for Optical Engineering | 2005
Nicolai Petrov; Charles Valverde; Qingyun Chen; Chen Xu; Vincent Paneccasio; Daniel Stritch; Christian Witt; Elizabeth Walker; Jeff Barnes; Michael Pavlov; Eugene Shalyt
Present work focuses on the process characteristics and material properties of electroless deposited CoWP, and CoWB thin layers. Such material properties as atomic and phase composition of thin Co alloys are compared. Consumption rates of the bath constituents are analyzed. Line resistance change of Cu interconnects capped with CoWP and CoWB is shown. Comparison of two types of capping layers and analysis of their process formation are presented. The capability of the selective capping layer formation on narrow Cu lines has been demonstrated.
Archive | 2005
Qingyun Chen; Charles Valverde; Vincent Paneccasio; Nicolai Petrov; Daniel Stritch; Christian Witt; Richard Hurtubise
Archive | 2007
Eric Yakobson; Richard Hurtubise; Christian Witt; Qingyun Chen
Archive | 2007
Xuan Lin; Richard Hurtubise; Vincent Paneccasio; Qingyun Chen
Archive | 2005
Charles Valverde; Nicolai Petrov; Eric Yakobson; Qingyun Chen; Vincent Paneccasio; Richard Hurtubise; Christian Witt
Archive | 2008
Qingyun Chen; Xuan Lin; Vincent Paneccasio; Richard Hurtubise
Archive | 2009
Vincent Paneccasio; Xuan Lin; Richard Hurtubise; Qingyun Chen
Archive | 2006
Vincent Paneccasio; Qingyun Chen; Charles Valverde; Nicolai Petrov; Christian Witt; Richard Hurtubise
Archive | 2008
Qingyun Chen; Vincent Paneccasio; Xuan Lin; Richard Hurtubise
Archive | 2007
Nicolai Petrov; Paul Figura; Qingyun Chen; Charles Valverde; Richard Hurtubise
