Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Arulkumar Shanmugasundram is active.

Publication


Featured researches published by Arulkumar Shanmugasundram.


Archive | 2006

Integrated electroless deposition system

Dmitry Lubomirsky; Arulkumar Shanmugasundram; Allen L. D'Ambra; Timothy W. Weidman; Eugene Rabinovich; Svetlana Sherman; Manoocher Birang; Yaxin Wang; Michael Yang; Bradley Hansen


Archive | 2006

Electroless deposition process on a silicon contact

Michael P. Stewart; Timothy W. Weidman; Arulkumar Shanmugasundram; David Eaglesham


Archive | 2006

Contact metallization scheme using a barrier layer over a silicide layer

Timothy W. Weidman; Kapila Wijekoon; Zhize Zhu; Avgerinos V. Gelatos; Amit Khandelwal; Arulkumar Shanmugasundram; Michael X. Yang; Fang Mei; Farhad Moghadam


Archive | 2004

Apparatus for electroless deposition

Dmitry Lubomirsky; Arulkumar Shanmugasundram; Ian A. Pancham; Sergey D. Lopatin


Archive | 2006

Electroless deposition processes and compositions for forming interconnects

Zhize Zhu; Timothy W. Weidman; Michael P. Stewart; Arulkumar Shanmugasundram; Nety M. Krishna; Anthony Konecni


Archive | 2003

Multi-chemistry plating system

Michael X. Yang; Ming Xi; Russell C. Ellwanger; Eric B. Britcher; Bernardo Donoso; Lily L. Pang; Svetlana Sherman; Henry Ho; Anh N. Nguyen; Alexander N. Lerner; Allen L. D'Ambra; Arulkumar Shanmugasundram; Tetsuya Ishikawa; Yevgeniy Rabinovich; Dmitry Lubomirsky; Yeuk-Fai Edwin Mok; Son T. Nguyen


Archive | 2006

In-situ silicidation metallization process

Timothy W. Weidman; Srinivas Gandikota; Michael P. Stewart; Avgerinos V. Gelatos; Arulkumar Shanmugasundram


Archive | 2007

Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing

Arulkumar Shanmugasundram; Alexander T. Schwarm


Archive | 2006

Method and apparatus for forming device features in an integrated electroless deposition system

Arulkumar Shanmugasundram; Timothy W. Weidman


Archive | 2005

Apparatus for electroless deposition of metals onto semiconductor substrates

Dmitry Lubomirsky; Arulkumar Shanmugasundram; Ian A. Pancham

Collaboration


Dive into the Arulkumar Shanmugasundram's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge