Arulkumar Shanmugasundram

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Arulkumar Shanmugasundram is active.

Explore More

Publication

Featured researches published by Arulkumar Shanmugasundram.

Archive | 2006

Integrated electroless deposition system

Dmitry Lubomirsky; Arulkumar Shanmugasundram; Allen L. D'Ambra; Timothy W. Weidman; Eugene Rabinovich; Svetlana Sherman; Manoocher Birang; Yaxin Wang; Michael Yang; Bradley Hansen

Archive | 2006

Electroless deposition process on a silicon contact

Michael P. Stewart; Timothy W. Weidman; Arulkumar Shanmugasundram; David Eaglesham

Archive | 2006

Contact metallization scheme using a barrier layer over a silicide layer

Timothy W. Weidman; Kapila Wijekoon; Zhize Zhu; Avgerinos V. Gelatos; Amit Khandelwal; Arulkumar Shanmugasundram; Michael X. Yang; Fang Mei; Farhad Moghadam

Archive | 2004

Apparatus for electroless deposition

Dmitry Lubomirsky; Arulkumar Shanmugasundram; Ian A. Pancham; Sergey D. Lopatin

Archive | 2006

Electroless deposition processes and compositions for forming interconnects

Zhize Zhu; Timothy W. Weidman; Michael P. Stewart; Arulkumar Shanmugasundram; Nety M. Krishna; Anthony Konecni

Archive | 2003

Multi-chemistry plating system

Michael X. Yang; Ming Xi; Russell C. Ellwanger; Eric B. Britcher; Bernardo Donoso; Lily L. Pang; Svetlana Sherman; Henry Ho; Anh N. Nguyen; Alexander N. Lerner; Allen L. D'Ambra; Arulkumar Shanmugasundram; Tetsuya Ishikawa; Yevgeniy Rabinovich; Dmitry Lubomirsky; Yeuk-Fai Edwin Mok; Son T. Nguyen

Archive | 2006