Ramakrishna Rao
General Electric
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Publication
Featured researches published by Ramakrishna Rao.
device research conference | 2006
Kevin Matocha; Vinayak Tilak; S. Balaji; Steve Arthur; Ramakrishna Rao; Jesse B. Tucker
SiC lateral MOSFETs were fabricated on an epitaxially-grown p-well on an n-type 4HSiC substrate. Source and drain regions were implanted with Nitrogen, and a body contact region was co-implanted with Aluminum and Carbon. Wafers were capped with graphite and implants were activated for 30 minutes at 1650°C. After sacrificial oxidation, the 80 nm gate oxide was grown at 1250°C in N20 followed by NO oxidation at 1175°C. A liftoff process was used to deposit Nickel for Ohmic contacts to n-type and p-type regions. The Molybdenum gate metal was deposited and patterned and then the Ohmic contacts were annealed at 1050°C for 3 minutes. Annular long-channel MOSFETs (Lch=100 pm) and MOS-gated Hall structures were fabricated and characterized as a function of temperature.
Archive | 2009
Kevin Matocha; Stephen Daley Arthur; Ramakrishna Rao; Peter Almern Losee; Zachary Stum
Archive | 2003
Thomas F. Papallo; Indra Purkayastha; Emad Andarawis Andarawis; Ertugrul Berkcan; Scott Charles Evans; Rahul Gore; Mingxiao Jiang; Shobhana Mani; Daniel Lawrence Morrill; Eugene Joseph Orlowski; Marc Robert Pearlman; William James Premerlani; Ramakrishna Rao; Samantha Rao; Austars Raymond Schnore; Charles Scott Sealing; Daniel White Sexton; Somashekhar Basavaraj; Terry Michael Topka
Archive | 2003
Emad Andarawis Andarawis; Daniel White Sexton; Austars Raymond Schnore; Ertugrul Berkcan; Changting Wang; Samantha Rao; Ramakrishna Rao; Eugene Joseph Orlowski; Somashekhar Basavaraj; Rahul Gore; Marc Robert Pearlman
Archive | 2003
Chayan Mitra; Ramakrishna Rao; Jeffrey Bernard Fedison; Ahmed Elasser
Archive | 2003
Chayan Mitra; Ramakrishna Rao; Jeffrey Bernard Fedison; Ahmed Elasser
Archive | 2002
Ramakrishna Rao; Stephen Daley Arthur; Peter Almern Losee; Kevin Dean Matocha
Archive | 2012
Stephen Daley Arthur; Kevin Matocha; Ramakrishna Rao; Peter Almern Losee; Alexander Viktorovich Bolotnikov
Archive | 2015
Stephen Daley Arthur; Kevin Matocha; Ramakrishna Rao; Peter Almern Losee; Alexander Viktorovich Bolotnikov
Archive | 2013
Stephen Daley Arthur; Kevin Matocha; Ramakrishna Rao; Peter Almern Losee; Alexander Viktorovich Bolotnikov