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Dive into the research topics where Reinhold Wahlich is active.

Publication


Featured researches published by Reinhold Wahlich.


Archive | 1997

Process for producing silicon semiconductor wafers with low defect density

Dieter Graef; Wilfried von Ammon; Reinhold Wahlich; Peter Krottenthaler; Ulrich Lambert


Archive | 2007

Multilayered Semiconductor Wafer and Process For Manufacturing The Same

Brian Murphy; Reinhold Wahlich


Archive | 1997

Method for producing silicon wafers with a low defect-density

Dieter Graef; Ammon Wilfried Von; Reinhold Wahlich; Peter Krottenthaler; Ulrich Lambert


Archive | 2005

Semiconductor substrate and process for producing it

Dirk Dantz; Andreas Dr. Dipl.-Phys. Huber; Reinhold Wahlich; Brian Murphy


Archive | 2005

Method and apparatus for leveling a semiconductor wafer, and semiconductor wafer with improved flatness

Theresia Bauer; Robert Hoelzl; Andreas Dr. Dipl.-Phys. Huber; Reinhold Wahlich


Archive | 2003

Process for the heat treatment of a silicon wafer, and silicon wafer produced

Robert Dr. Dipl.-Chem. Hölzl; Christoph Seuring; Reinhold Wahlich; Wilfried von Ammon


Archive | 2006

Silicon wafer and process for the heat treatment of a silicon wafer

Timo Mueller; Wilfried von Ammon; Erich Dr. Daub; Peter Krottenthaler; Klaus Messmann; Friedrich Dr. Passek; Reinhold Wahlich; Arnold Kuehhorn; Johannes Studener


Archive | 2005

SOI wafer and method for producing it

Dieter Graef; Markus Blietz; Reinhold Wahlich; Alfred Dipl.-Phys.Dr. Miller; Dirk Dipl.-Krist.Dr. Zemke


Archive | 2004

Verfahren und Vorrichtung zum Einebnen einer Halbleiterscheibe sowie Halbleiterscheibe mit verbesserter Ebenheit

Theresia Bauer; Robert Dipl.-Chem. Dr. Hölzl; Andreas Dipl.-Phys. Dr. Huber; Reinhold Wahlich


Archive | 2008

Layered semiconductor wafer with low warp and bow, and process for producing it

Markus Blietz; Robert Hoelzl; Reinhold Wahlich; Andreas Huber

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Timo Müller

Karlsruhe Institute of Technology

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Andreas Huber

Massachusetts Institute of Technology

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