Remus Nicolaescu

A high-speed silicon optical modulator based on a metal–oxide–semiconductor capacitor

Silicon has long been the optimal material for electronics, but it is only relatively recently that it has been considered as a material option for photonics. One of the key limitations for using silicon as a photonic material has been the relatively low speed of silicon optical modulators compared to those fabricated from III–V semiconductor compounds and/or electro-optic materials such as lithium niobate. To date, the fastest silicon-waveguide-based optical modulator that has been demonstrated experimentally has a modulation frequency of only ∼20 MHz (refs 10, 11), although it has been predicted theoretically that a ∼1-GHz modulation frequency might be achievable in some device structures. Here we describe an approach based on a metal–oxide–semiconductor (MOS) capacitor structure embedded in a silicon waveguide that can produce high-speed optical phase modulation: we demonstrate an all-silicon optical modulator with a modulation bandwidth exceeding 1 GHz. As this technology is compatible with conventional complementary MOS (CMOS) processing, monolithic integration of the silicon modulator with advanced electronics on a single silicon substrate becomes possible.

An all-silicon Raman laser

The possibility of light generation and/or amplification in silicon has attracted a great deal of attention for silicon-based optoelectronic applications owing to the potential for forming inexpensive, monolithic integrated optical components. Because of its indirect bandgap, bulk silicon shows very inefficient band-to-band radiative electron–hole recombination. Light emission in silicon has thus focused on the use of silicon engineered materials such as nanocrystals, Si/SiO2 superlattices, erbium-doped silicon-rich oxides, surface-textured bulk silicon and Si/SiGe quantum cascade structures. Stimulated Raman scattering (SRS) has recently been demonstrated as a mechanism to generate optical gain in planar silicon waveguide structures. In fact, net optical gain in the range 2–11 dB due to SRS has been reported in centimetre-sized silicon waveguides using pulsed pumping. Recently, a lasing experiment involving silicon as the gain medium by way of SRS was reported, where the ring laser cavity was formed by an 8-m-long optical fibre. Here we report the experimental demonstration of Raman lasing in a compact, all-silicon, waveguide cavity on a single silicon chip. This demonstration represents an important step towards producing practical continuous-wave optical amplifiers and lasers that could be integrated with other optoelectronic components onto CMOS-compatible silicon chips.

Raman gain and nonlinear optical absorption measurements in a low-loss silicon waveguide

We fabricated a low-loss (∼0.22dB∕cm) rib waveguide (WG) in silicon-on-insulator with a small effective core area of ∼1.57μm2 and measured the stimulated Raman scattering gain in the WG. We obtained 2.3dB Raman gain in a 4.8-cm-long S-shaped WG using a 1455nm pump laser with a cw power of 0.9W measured before the WG. In addition, we observed nonlinear dependence of Raman gain and optical propagation loss as a function of the pump power. Our study shows that this mainly is due to two-photon absorption (TPA) induced free carrier absorption in the silicon WG. We experimentally determined the TPA induced free carrier lifetime of 25ns, which agrees well with our modeling.

Fast silicon optical modulator

We present design, fabrication, and testing of a high-speed all-silicon optical phase modulator in silicon-on-insulator (SOI). The optical modulator is based on a novel silicon waveguide phase shifter containing a metal-oxide-semiconductor (MOS) capacitor. We show that, under the accumulation condition, the drive voltage induced charge density change in the silicon waveguide having a MOS capacitor can be used to modulate the phase of the optical mode due to the free-carrier plasma dispersion effect. We experimentally determined the phase modulation efficiency of the individual phase shifter and compared measurements with simulations. A good agreement between theory and experiment was obtained for various phase shifter lengths. We also characterized both the low- and high-frequency performance of the integrated Mach-Zehnder interferometer (MZI) modulator. For a MZI device containing two identical phase shifters of 10 mm, we obtained a DC extinction ratio above 16 dB. For a MZI modulator containing a single-phase shifter of 2.5 mm in one of the two arms, the frequency dependence of the optical response was obtained by a small signal measurement. A 3-dB bandwidth exceeding 1 GHz was demonstrated. This modulation frequency is two orders of magnitude higher than has been demonstrated in any silicon modulators based on current injection in SOI.