Richard C. Ruby

Micromachined 1 × 2 optical-fiber switch

Abstract This paper describes a 1 × 2 thermally actuated optical-fiber switch. The switch includes a thick electroplated nickel actuator to move a single- mode optical fiber, and a trench anistropically etched in silicon for alignment of ‘end’ and ‘receive’ optical fibers. The switch is designed such that the optical fibers do not need to be coupled by means of waveguide or lenses in order to achieve the desired low-loss switching function. The switch actuators are made from 25–50 μm thick electroplated nickel. The switches use edges of trenches anisotropically eched in silicon for fiber alignment. Test actuators have been built at the same time as the switches, integrated with short, stiff cantilevers to be used as force gauges, as well as etched deflection scales.