Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Robbert Wilhelmus Elisabeth van de Kruijs is active.

Publication


Featured researches published by Robbert Wilhelmus Elisabeth van de Kruijs.


Archive | 2009

Reflective optical element for EUV lithography device

Andrey Yakshin; Robbert Wilhelmus Elisabeth van de Kruijs; Fred Bijkerk; Eric Louis; I. Nedelcu


Archive | 2008

Reflektives optisches Element für EUV-Lithographievorrichtungen

Andrey Yakshin; Robbert Wilhelmus Elisabeth van de Kruijs; Fred Bijkerk; Eric Louis


Archive | 2014

METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY

Alexey Kuznetzov; M.A. Gleeson; Robbert Wilhelmus Elisabeth van de Kruijs; Frederik Bijkerk


Archive | 2011

Verfahren zur Herstellung eines reflektiven optischen Elements für die EUV-Lithographie

Alexey Kuznetsov; M.A. Gleeson; Robbert Wilhelmus Elisabeth van de Kruijs; Frederik Bijkerk


Archive | 2015

Translating the Borrmann effect into narrow-band EUV transmission windows

J.L.P. Barreaux; Igor V. Kozhevnikov; Hubertus M.J. Bastiaens; Robbert Wilhelmus Elisabeth van de Kruijs; Frederik Bijkerk; Klaus J. Boller


Archive | 2015

Narrow-band, 13.5 nm Zr-coated Ni/Si multilayer Borrmann filter

J.L.P. Barreaux; Igor V. Kozhevnikov; Hubertus M.J. Bastiaens; Robbert Wilhelmus Elisabeth van de Kruijs; Frederik Bijkerk; Klaus J. Boller


MESA+ Meeting 2013 | 2013

The Industrial Focus Group XUV Optics

Jacobus Marinus Sturm; Robbert Wilhelmus Elisabeth van de Kruijs; Andrey Yakshin; Christopher James Lee; Eric Louis; Frederik Bijkerk


Physics@FOM Veldhoven 2012: Tertiary Chemical interactions at the interfaces of Mo/B4C/Si/B4C multilayers upon low-temperature annealing | 2012

Infrared suppression by hybrid EUV multilayer - IR lossy etalon structures

Viacheslav Medvedev; Andrey Yakshin; Robbert Wilhelmus Elisabeth van de Kruijs; Vladimir Mihailovitch Krivtsun; A.M. Yakunin; Frederik Bijkerk


Physics@FOM Veldhoven 2012: Tertiary Chemical interactions at the interfaces of Mo/B4C/Si/B4C multilayers upon low-temperature annealing | 2012

Chemical interactions at the interfaces of Mo/B4C/Si/B4C multilayers upon low-temperature annealing

S.L. Nyabero; Robbert Wilhelmus Elisabeth van de Kruijs; Andrey Yakshin; Frederik Bijkerk


Netherlands MicroNanoConference 2012 | 2012

Bragg reflectors with IR suppression for Extreme Ultraviolet Lithography

Viacheslav Medvedev; Andrey Yakshin; Robbert Wilhelmus Elisabeth van de Kruijs; Vladimir Mihailovitch Krivtsun; A.M. Yakunin; Kn Koshelev; Frederik Bijkerk

Collaboration


Dive into the Robbert Wilhelmus Elisabeth van de Kruijs's collaboration.

Top Co-Authors

Avatar

Frederik Bijkerk

MESA+ Institute for Nanotechnology

View shared research outputs
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar

Viacheslav Medvedev

MESA+ Institute for Nanotechnology

View shared research outputs
Top Co-Authors

Avatar

Frederik Bijkerk

MESA+ Institute for Nanotechnology

View shared research outputs
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge