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Robert Griffith O'Neill

Lam Research

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Publication

Featured researches published by Robert Griffith O'Neill.

Archive | 2013

Dense oxide coated component of a plasma processing chamber and method of manufacture thereof

Hong Shih; Lin Xu; John Michael Kerns; William Charles; John Daugherty; Sivakami Ramanathan; Russell Ormond; Robert Griffith O'Neill; Tom Stevenson

Archive | 2009

Method and system for centering wafer on chuck

Robert Griffith O'Neill; Jorge Luque; Shang-I Chou; Harmeet Singh

Archive | 2013

CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS

John Daugherty; Hong Shih; Lin Xu; Anthony Amadio; Robert Griffith O'Neill; Peter Holland; Sivakami Ramanathan; Tae Won Kim; Duane Outka; John Michael Kerns; Sonia Castillo

Archive | 2014

Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output

Ole Waldmann; Eric A. Pape; Robert Griffith O'Neill; Francisco Martinez

Archive | 2014

EDGE RING ASSEMBLY FOR PLASMA PROCESSING CHAMBER AND METHOD OF MANUFACTURE THEREOF

Sanket Sant; Robert Griffith O'Neill

Archive | 2013

System, method and apparatus for RF power compensation in plasma etch chamber

Robert Griffith O'Neill; Arthur Sato; Eric Tonnis; Shang-I Chou

Archive | 2017

APPLICATION OF POWERED ELECTROSTATIC FARADAY SHIELD TO RECONDITION DIELECTRIC WINDOW IN ICP PLASMAS

Robert Griffith O'Neill; Neil Benjamin; Jie Zhang

Archive | 2016

MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICONDUCTOR WAFER PROCESSING

Haoquan Yan; Robert Griffith O'Neill; Raphael Casaes; Jon McChesney; Alex Paterson

Archive | 2015

METHOD OF CALCULATING POWER INPUT TO ARRAY OF THERMAL CONTROL ELEMENTS TO ACHIEVE TWO-DIMENSIONAL TEMPERATURE OUTPUT PROFILE

Ole Waldmann; Eric A. Pape; Robert Griffith O'Neill; Francisco Martinez

Archive | 2015

COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACES OF A COMPONENT OF A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

Lin Xu; Hong Shih; Nash W. Anderson; Tom Stevenson; John Daugherty; John Michael Kerns; Robert Griffith O'Neill

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Hong Shih

Lam Research

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John Daugherty

Lam Research

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John Michael Kerns

Lam Research

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Lin Xu

Lam Research

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Tom Stevenson

Lam Research

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Shang-I Chou

Lam Research

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Anthony Amadio

Lam Research

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Eric A. Pape

Lam Research

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Francisco Martinez

Lam Research

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Harmeet Singh

Lam Research

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