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Tom Stevenson

Lam Research

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Publication

Featured researches published by Tom Stevenson.

Archive | 2013

Composite showerhead electrode assembly for a plasma processing apparatus

Dean J. Larson; Tom Stevenson; Victor Wang

Archive | 2008

Film adhesive for semiconductor vacuum processing apparatus

Dean J. Larson; Tom Stevenson; Victor Wang

Archive | 2013

Dense oxide coated component of a plasma processing chamber and method of manufacture thereof

Hong Shih; Lin Xu; John Michael Kerns; William Charles; John Daugherty; Sivakami Ramanathan; Russell Ormond; Robert Griffith O'Neill; Tom Stevenson

Archive | 2012

PRESSURE CONTROLLED HEAT PIPE TEMPERATURE CONTROL PLATE

Michael C. Kellogg; Rajinder Dhindsa; Tom Stevenson

Archive | 2010

Plasma processing chamber component having adaptive thermal conductor

Tom Stevenson; Michael Dickens

Archive | 2008

A composite showerhead electrode assembly for a plasma processing apparatus

Dean J. Larson; Tom Stevenson; Victor Wang

Archive | 2010

Light-up prevention in electrostatic chucks

Tom Stevenson; Daniel Byun; Saurabh Ullal; Babak Kadkhodayan; Rajinder Dhindsa

Archive | 2015

COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACES OF A COMPONENT OF A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

Lin Xu; Hong Shih; Nash W. Anderson; Tom Stevenson; John Daugherty; John Michael Kerns; Robert Griffith O'Neill

Archive | 2015

COMPONENT OF A PLASMA PROCESSING APPARATUS INCLUDING AN ELECTRICALLY CONDUCTIVE AND NONMAGNETIC COLD SPRAYED COATING

John Daugherty; Hong Shih; Anthony Amadio; Tom Stevenson; Lin Xu; John Michael Kerns; Robert Griffith O'Neill; Sonia Castillo

Archive | 2013

COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RESISTANT COATINGS

Tom Stevenson; Hong Shih; Robert Griffith O'Neill; Tae Won Kim; Raphael Casaes; Yan Fang

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Hong Shih

Lam Research

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Rajinder Dhindsa

Lam Research

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Robert Griffith O'Neill

Lam Research

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Dean J. Larson

Lam Research

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John Daugherty

Lam Research

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John Michael Kerns

Lam Research

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Lin Xu

Lam Research

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Victor Wang

Lam Research

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Babak Kadkhodayan

Lam Research

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Daniel Byun

Lam Research

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