Is this you? Create Your Porfile
Avatar

Robert J. Small

Air Products & Chemicals

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Robert J. Small is active.

Explore More

Publication

Featured researches published by Robert J. Small.

Archive | 2003

Free radical-forming activator attached to solid and used to enhance CMP formulations

Brandon S. Scott; Robert J. Small

Archive | 2008

Compositions and methods for rapidly removing overfilled substrates

Philippe H. Chelle; Robert J. Small

Archive | 2003

Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same

Robert J. Small; Brandon S. Scott

Archive | 2003

Catalyst attached to solid and used to promote free radical formation in CMP formulations

Brandon S. Scott; Robert J. Small

Archive | 2004

Periodic Acid Compositions For Polishing Ruthenium/Low K Substrates

Robert J. Small; Haruki Nojo; Kenichi Orui; Steve Masami Aragaki; Atsushi Hayashida

Archive | 2009

Compositions for chemical-mechanical planarization of noble-metal-featured substrates, associated methods, and substrates produced by such methods

Robert J. Small; Zhefei J. Chen

Archive | 2002

Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates

Robert J. Small; Zhefei J. Chen

Archive | 2003

An feststoff gebundener radikalbildender aktivator und verwendung zur verbesserung von formulierungen für das chemisch-mechanische polieren

Robert J. Small; Brandon S. Scott

Archive | 2003

Aktivator zur freien Radikalbildung als Festkörper für erweiterte CMP-Formulierungen

Brandon S. Scott; Robert J. Small

Archive | 2003

Activateur de formation de radical libre lie a un solide et utilise pour ameliorer des formulations de polissage chimique-mecanique

Brandon S. Scott; Robert J. Small

Explore More

Collaboration

Dive into the Robert J. Small's collaboration.

Top Co-Authors
Avatar

Brandon S. Scott

Air Products

View shared research outputs
Top Co-Authors
Avatar

Zhefei J. Chen

Air Products

View shared research outputs
Top Co-Authors
Avatar

Atsushi Hayashida

Air Products

View shared research outputs
Top Co-Authors
Avatar

Haruki Nojo

Air Products

View shared research outputs
Top Co-Authors
Avatar

Kenichi Orui

Air Products

View shared research outputs
Top Co-Authors
Avatar

Philippe H. Chelle

Air Products

View shared research outputs
Top Co-Authors
Avatar

Steve Masami Aragaki

Air Products

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge