Robert J. Small

Free radical-forming activator attached to solid and used to enhance CMP formulations

Compositions and methods for rapidly removing overfilled substrates

Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same

Catalyst attached to solid and used to promote free radical formation in CMP formulations

Periodic Acid Compositions For Polishing Ruthenium/Low K Substrates

Compositions for chemical-mechanical planarization of noble-metal-featured substrates, associated methods, and substrates produced by such methods

Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates

An feststoff gebundener radikalbildender aktivator und verwendung zur verbesserung von formulierungen für das chemisch-mechanische polieren

Aktivator zur freien Radikalbildung als Festkörper für erweiterte CMP-Formulierungen

Activateur de formation de radical libre lie a un solide et utilise pour ameliorer des formulations de polissage chimique-mecanique