Robert J. Steger | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Robert J. Steger is active.

Explore More

Publication

Featured researches published by Robert J. Steger.

Archive | 2000

Low contamination plasma chamber components and methods for making the same

Christopher C. Chang; Robert J. Steger

Archive | 2002

Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support

Neil Benjamin; Robert J. Steger

Archive | 2004

Critical dimension variation compensation across a wafer by means of local wafer temperature control

Robert J. Steger

Archive | 2001

Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof

Robert J. Steger; Chris Chang

Archive | 2011

Substrate support having dynamic temperature control

Robert J. Steger

Archive | 2007

Electrostatic chuck having radial temperature control capability

Robert J. Steger

Archive | 2007

Faraday shield disposed within an inductively coupled plasma etching apparatus

Keith Comendant; Robert J. Steger

Archive | 2005

Method and apparatus for controlling spatial temperature distribution

Neil Benjamin; Robert J. Steger

Archive | 2004

Method and apparatus for the compensation of edge ring wear in a plasma processing chamber

Robert J. Steger

Archive | 2003

Switched uniformity control

Richard A. Gottscho; Robert J. Steger

Explore More

Collaboration

Dive into the Robert J. Steger's collaboration.

Top Co-Authors

Neil Benjamin

Lam Research

View shared research outputs

Top Co-Authors

Keith Comendant

Lam Research

View shared research outputs

Top Co-Authors

Richard A. Gottscho

Lam Research

View shared research outputs

Top Co-Authors

Chris Chang

Lam Research

View shared research outputs

Top Co-Authors

Andrew Perry

Lam Research

View shared research outputs

Top Co-Authors

Nicolas J. Bright

Lam Research

View shared research outputs

Explore More