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Keith Comendant

Lam Research

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Publication

Featured researches published by Keith Comendant.

Archive | 2013

HEATING PLATE WITH PLANAR HEATING ZONES FOR SEMICONDUCTOR PROCESSING

Harmeet Singh; Neil Benjamin; Keith Comendant

Archive | 2009

Substrate temperature control by using liquid controlled multizone substrate support

Harmeet Singh; Keith Comendant

Archive | 2004

Apparatus for spatial and temporal control of temperature on a substrate

Anthony Ricci; Keith Comendant; James E. Tappan

Archive | 2006

Upper electrode backing member with particle reducing features

Anthony de la Llera; Allan Ronne; Jaehyun Kim; Jason Augustino; Rajinder Dhindsa; Yen-Kun Victor Wang; Saurabh Ullal; Anthony J. Norell; Keith Comendant; William M. Denty

Archive | 2007

Faraday shield disposed within an inductively coupled plasma etching apparatus

Keith Comendant; Robert J. Steger

Archive | 2006

Showerhead electrode assembly with gas flow modification for extended electrode life

Jason Augustino; Anthony de la Llera; Allan Ronne; Jaehyun Kim; Rajinder Dhindsa; Yen-Kun Victor Wang; Saurabh Ullal; Anthony J. Norell; Keith Comendant; William M. Denty

Archive | 2010

Adjusting substrate temperature to improve cd uniformity

Harmeet Singh; Keith Comendant; Vahid Vahedi

Archive | 2013

THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

Keith Comendant; Anthony Ricci

Archive | 2008

Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system

Anthony Ricci; Jim Tappan; Keith Comendant

Archive | 2006

Method of tuning thermal conductivity of electrostatic chuck support assembly

Robert J. Steger; Keith Comendant

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Collaboration

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Harmeet Singh

Lam Research

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Anthony Ricci

Lam Research

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Jaehyun Kim

Lam Research

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Neil Benjamin

Lam Research

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Arthur Sato

Lam Research

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Feiyang Wu

Lam Research

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James E. Tappan

Lam Research

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Qing Liu

Lam Research

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Robert J. Steger

Lam Research

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Alexander Matyushkin

Lam Research

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