Is this you? Create Your Porfile
Avatar

Robert Kaim

Entegris

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Robert Kaim is active.

Explore More

Publication

Featured researches published by Robert Kaim.

Archive | 2005

Novel methods for cleaning ion implanter components

Frank Dimeo; James Dietz; W. Olander; Robert Kaim; Steven E. Bishop; Jeffrey W. Neuner

Archive | 2006

Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation

Karl M. Olander; Jose I. Arno; Robert Kaim

Archive | 2005

Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel

James Dietz; Steven E. Bishop; James V. Mcmanus; Steven M. Lurcott; Michael J. Wodjenski; Robert Kaim; Frank Dimeo

Archive | 2006

Delivery of Low Pressure Dopant Gas to a High Voltage Ion Source

W. Karl Olander; Jose I. Arno; Robert Kaim

Archive | 2004

Methods for cleaning ion implanter components

Frank Dimeo; James Dietz; W. Karl Olander; Robert Kaim; Steven E. Bishop; Jeffrey W. Neuner; Jose I. Arno

Archive | 2014

Enriched silicon precursor compositions and apparatus and processes for utilizing same

James J. Mayer; Richard S. Ray; Robert Kaim; Joseph D. Sweeney

Archive | 2016

SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURSOR COMPOSITIONS THEREFOR

Ying Tang; Joseph D. Sweeney; Tianniu Chen; James J. Mayer; Richard S. Ray; Oleg Byl; Sharad Yedave; Robert Kaim

Archive | 2011

ION IMPLANTER SYSTEM INCLUDING REMOTE DOPANT SOURCE, AND METHOD COMPRISING SAME

W. Karl Olander; Robert Kaim; Joseph D. Sweeney; Joseph Despres

Archive | 2006

Implantation d'ions de bore utilisant des precurseurs alternatifs de bore fluores, et formation de gros hydrures de bore a des fins d'implantation

Karl M. Olander; Jose I. Arno; Robert Kaim

Archive | 2006

Distribution de gaz dopant basse pression a une source ionique haute tension

Jose I. Arno; W. Karl Olander; Robert Kaim

Explore More

Collaboration

Dive into the Robert Kaim's collaboration.

Top Co-Authors
Avatar

Frank Dimeo

Northwestern University

View shared research outputs
Top Co-Authors
Avatar

Steven E. Bishop

Entegris

View shared research outputs
Top Co-Authors
Avatar

W. Karl Olander

Entegris

View shared research outputs
Top Co-Authors
Avatar

James Dietz

IBM

View shared research outputs
Top Co-Authors
Avatar

Joseph D. Sweeney

Entegris

View shared research outputs
Top Co-Authors
Avatar

James V. Mcmanus

IBM

View shared research outputs
Top Co-Authors
Avatar

James J. Mayer

Entegris

View shared research outputs
Top Co-Authors
Avatar

Richard S. Ray

Entegris

View shared research outputs
Top Co-Authors
Avatar

Joseph Despres

Entegris

View shared research outputs
Top Co-Authors
Avatar

Oleg Byl

Entegris

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge