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W. Karl Olander

Entegris

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Publication

Featured researches published by W. Karl Olander.

Archive | 1996

Fluid storage and delivery system utilizing carbon sorbent medium

Glenn M. Tom; James V. McManus; W. Karl Olander

Archive | 1996

Fluid storage and delivery system comprising high work capacity physical sorbent

Glenn M. Tom; James V. McManus; W. Karl Olander

Archive | 1998

Process for removing and recovering halocarbons from effluent process streams

Glenn M. Tom; H. Eric Fisher; W. Karl Olander

Archive | 2007

Cleaning of semiconductor processing systems

Frank Dimeo; James Dietz; W. Karl Olander; Robert Kaim; Steven E. Bishop; Jeffrey W. Neuner; Jose I. Arno; Paul J. Marganski; Joseph D. Sweeney; David Eldridge; Sharad Yedave; Oleg Byl; Gregory T. Stauf

Archive | 2002

Sorbent-based gas storage and delivery system

Glenn M. Tom; James V. McManus; Luping Wang; W. Karl Olander

Archive | 2006

Fluid storage and dispensing systems, and fluid supply processes comprising same

W. Karl Olander; James V. McManus; Steven J. Hultquist; Jose I. Arno; Peter C. Van Buskirk

Archive | 2009

Semiconductor manufacturing facility utilizing exhaust recirculation

W. Karl Olander; Joseph D. Sweeney; Luping Wang

Archive | 1998

Apparatus and method for the in-situ generation of dopants

Gautam Bhandari; W. Karl Olander; Michael A. Todd; Timothy E. Glassman

Archive | 2011

VENTILATION GAS MANAGEMENT SYSTEMS AND PROCESSES

W. Karl Olander; Paul J. Marganski

Archive | 2006

Delivery of Low Pressure Dopant Gas to a High Voltage Ion Source

W. Karl Olander; Jose I. Arno; Robert Kaim

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Collaboration

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Joseph D. Sweeney

Entegris

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Steven E. Bishop

Entegris

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Robert Kaim

Entegris

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Joseph Despres

Entegris

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Robert Kaim

Entegris

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Frank Dimeo

Northwestern University

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Jose I. Arno

Entegris

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Oleg Byl

Entegris

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Paul J. Marganski

Entegris

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Sharad Yedave

Entegris

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