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Dive into the research topics where Robert T. Fayfield is active.

Publication


Featured researches published by Robert T. Fayfield.


Archive | 2000

Direct vapor delivery of enabling chemical for enhanced hf etch process performance

Robert T. Fayfield; John M. Heitzinger


Archive | 2002

Ultra-miniature magnetic device

Fred C. Hiatt; John E. Decramer; Robert T. Fayfield; Richard J. Rassel


Archive | 1995

Method and apparatus for surface conditioning

Jeffery W. Butterbaugh; David C. Gray; Robert T. Fayfield; Kevin L. Siefering; John M. Heitzinger; Fred C. Hiatt


Archive | 2002

Method of manufacturing an ultra-miniature magnetic device

Fred C. Hiatt; John E. Decramer; Robert T. Fayfield; Richard J. Rassel


Archive | 1998

HF/IPA based process for removing undesired oxides form a substrate

Lawrence E. Carter; Brent Schwab; Robert T. Fayfield


Archive | 2000

Equipment for UV wafer heating and photochemistry

Robert T. Fayfield; Brent Schwab


Archive | 1996

Uv/halogen treatment for dry oxide etching

Robert T. Fayfield; Brent Schwab


Archive | 1998

Equipment for uv wafer heating and photochemical processing

Robert T. Fayfield; Brent Schwab


Archive | 1999

Process for removing oxide using hydrogen fluoride vapor

Lawrence E. Carter; Brent Schwab; Robert T. Fayfield


Archive | 1998

Method for delivery of hydrogen fluoride gas

Lawrence E. Carter; Robert T. Fayfield

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