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Roger B. Fish

Varian Semiconductor

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Publication

Featured researches published by Roger B. Fish.

Archive | 2009

In vacuum optical wafer heater for cryogenic processing

Roger B. Fish; Jeffrey E. Krampert

Archive | 2010

OPTICAL HEATER FOR CRYOGENIC ION IMPLANTER SURFACE REGENERATION

Roger B. Fish; Jeffrey E. Krampert

Archive | 2009

MULTILAYER ELECTROSTATIC CHUCK WAFER PLATEN

Roger B. Fish

Archive | 2008

Fluid delivery mechanism for vacuum wafer processing system

Roger B. Fish; Robert J. Mitchell

Archive | 2008

Techniques for changing temperature of a platen

Roger B. Fish; Samuel M. Barsky; Scott C. Holden; Arthur P. Riaf; Steven M. Anella

Archive | 2009

PLATEN COOLING MECHANISM FOR CRYOGENIC ION IMPLANTING

Roger B. Fish; Samuel M. Barsky; Steven M. Anella

Archive | 2015

PLATEN SUPPORT STRUCTURE

Roger B. Fish; Steven M. Anella; Todd Lewis Maceachern

Archive | 2013

WAFER PLATEN THERMOSYPHON COOLING SYSTEM

Gregory Citver; Roger B. Fish

Archive | 2012

Vacuum Insulated Cryogenic Fluid Transfer Hose

Roger B. Fish; Michael D. Santorella

Archive | 2012

Vacuum Insulated Fitting Enclosure

Roger B. Fish; Michael D. Santorella

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Steven M. Anella

Varian Semiconductor

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Jeffrey E. Krampert

Varian Semiconductor

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Michael D. Santorella

Varian Semiconductor

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Samuel M. Barsky

Varian Semiconductor

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Scott C. Holden

Varian Semiconductor

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Arthur P. Riaf

Varian Semiconductor

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Daniel A. Hall

Varian Semiconductor

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Gregory Citver

Varian Semiconductor

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Michael Esposito

Varian Semiconductor

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Richard V. Chisholm

Varian Semiconductor

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