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Steven M. Anella

Varian Semiconductor

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Publication

Featured researches published by Steven M. Anella.

Archive | 2006

Methods and apparatus for enabling multiple process steps on a single substrate

Peter Nunan; Anthony Renau; Alan Sheng; Paul J. Murphy; Kyu-Ha Shim; Charles Teodorczyk; Steven M. Anella; Samuel M. Barsky; Lawrence Ficarra; Richard J. Hertel

Archive | 2010

TECHNIQUES FOR MANUFACTURING SOLAR CELLS

Steven M. Anella

Archive | 2010

Masked ion implant with fast-slow scan

Nicholas P.T. Bateman; Steven M. Anella; Benjamin B. Riordon; Atul Gupta

Archive | 2009

IMPLANTING A SOLAR CELL SUBSTRATE USING A MASK

Steven M. Anella; William T. Weaver

Archive | 2010

Integrated shadow mask/carrier for patterned ion implantation

Nicholas P.T. Bateman; Kevin M. Daniels; Atul Gupta; Russell J. Low; Benjamin D. Riordon; Robert J. Mitchell; Steven M. Anella

Archive | 2011

MECHANISM AND METHOD FOR ALIGNING A WORKPIECE TO A SHADOW MASK

William T. Weaver; Russell J. Low; Steven M. Anella; Robert J. Mitchell

Archive | 2011

Thermal Control of a Proximity Mask and Wafer During Ion Implantation

Benjamin B. Riordon; Steven M. Anella

Archive | 2010

Masked ion implantation with fast-slow scan

Nicholas P.T. Bateman; Steven M. Anella; Benjamin B. Riordon; Atul Gupta

Archive | 2008

Techniques for changing temperature of a platen

Roger B. Fish; Samuel M. Barsky; Scott C. Holden; Arthur P. Riaf; Steven M. Anella

Archive | 2009

PLATEN COOLING MECHANISM FOR CRYOGENIC ION IMPLANTING

Roger B. Fish; Samuel M. Barsky; Steven M. Anella

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Collaboration

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Atul Gupta

Varian Semiconductor

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Nicholas P.T. Bateman

Varian Semiconductor

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Roger B. Fish

Varian Semiconductor

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Benjamin B. Riordon

Varian Semiconductor

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Robert J. Mitchell

Varian Semiconductor

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William T. Weaver

Varian Semiconductor

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Russell J. Low

Varian Semiconductor

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Samuel M. Barsky

Varian Semiconductor

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Benjamin D. Riordon

Varian Semiconductor

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Kevin M. Daniels

Varian Semiconductor

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