Rostyslav Mastylo

New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes

With the nanopositioning and nanomeasuring machine (NPM-Machine) developed at the Technische Universitat Ilmenau, subnanometre resolution and nanometre uncertainty in a measuring volume of 25 × 25 × 5 mm3 have been demonstrated in the last few years. This machine allows the most various measuring problems to be solved. In practice, however, there are too many different requirements for sensing surfaces or for detecting structures. So, this paper deals with the development and also the improvement of several optical and tactile probes for application in the NPM-Machine. A focus probe with a spot size of approximately 0.5 µm, a working distance of 1.5 mm and a resolution of less than 1 nm was developed and adopted in the NPM-Machine. In the next step, the working distance was improved to exploit the full vertical range of the NPM-Machine of 5 mm. To realize tactile sensing, an atomic force probe and tactile stylus probe were developed on the basis of the focus probe. These probing systems can acquire measuring data only by scanning the surface sequentially and point-by-point. To increase data acquisition, we realized a sensor based on a white-light interference microscope and parallel sampling of 1600 × 1200 data points. First results of fringe evaluation with laser interferometer reference are presented.

A focus sensor for an application in a nanopositioning and nanomeasuring machine

A focus sensor on the basis of a hologram laser unit was developed and successfully tested in a nanopositioning and nanomeasuring machine as a zero indicator. The high resolution of the focus sensor is due to a high-precision optical adjustment and special solutions incorporated into the electronic parts. Thus, any sensor malfunctions caused by back-reflected light inside of the assembly could be completely avoided by means of the special high-frequency modulation and laser power stabilization. Common mode noise reduction provides the high SNR of the output signals. The measurements were made according to a dynamic principle by permanent difference formation between the output signal of the focus sensor and the length value of the z-interferometer of the nanopositioning and nanomeasuring machine. The measuring results are presented, and further possibilities of application are outlined.

Entwicklung eines Fokussensors und Integration in die Nanopositionier- und Nanomessmaschine (Development of a Focus Sensor and its Integration into the Nanopositioning and Nanomeasuring Machine)

Abstract Ein Fokussensor auf der Basis einer Hologramm-Laser-Unit wurde entwickelt und in einer Nanopositionier- und Nanomessmaschine als Nullindikator erfolgreich getestet. Die Messungen wurden im dynamischen Modus mit permanenter Differenzbildung zwischen dem Ausgangssignal des Fokussensors und dem Längenwert des Z-Interferometers der Nanopositionier- und Nanomessmaschine durchgeführt. Die Messergebnisse und Messmöglichkeiten sind dargestellt.

Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes

The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.

Nanopositioning and nanomeasuring machine for high accuracy measuring procedures of small features in large areas

Driven by increasing precision and accuracy requirements due to miniaturization and performance enhancement, measuring technologies need alternative ways of positioning, probing and measurement strategies. The paper describes the operation of the high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0.1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universitat Ilmenau and manufactured by the SIOS Messtechnik GmbH Ilmenau. Three plane-mirror miniature interferometers and two angular sensors are arranged, to realize in all three coordinates zero Abbe offset measurements. Therefore, this device closes a gap in coordinate-measuring technique regarding resolution, accuracy and measuring range. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, step height standards.

Ongoing trends in precision metrology,particularly in nanopositioning and nanomeasuring technology

Abstract Continuing engineering progress in precision fabrication technologies, especially in the diversified micro- and nanotechnology, stimulates the advance in precision metrology, particularly in nanopositioning and nanomeasuring technology. Structures reach atomic dimensions, and becoming more and more complex. Consequently, measurements are required – to an increasing extend – of larger surface regions and sidewalls with higher aspect ratios as well as fully 3D micro- and nano-structures. Therefore, the resolution of nanomeasuring machines approaches the picometre level and the frequency stability of the laser sources the range of 10–10 to provide multiscale accuracy. Area-measuring optical sensors provide vast amount of data (> 5 Tbyte). Lateral highly resolved measurements are only possible by tip-based AFM single point probes but are extremely time consuming. Here, adaptive intelligent algorithms for optimum hierarchical measurement strategies are necessary. Multisenor instrumentation and multiparameter characterization provide additional challenges also in profoundly parallel data processing.

Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine

The today’s nanometrology limits the accuracy of the precision engineering. These limits are based on the meter definition as redefined in 1983. It is proposed to define precision mechatronics as the science and engineering of high level precision systems and machines. The paper describes a precision mechatronic machine. This device represents a long range positioning machine having a resolution of 0.1 nm over the range of 25 mm x 25 mm x 5 mm. The integration of several optical and tactile nanoprobes makes the 3D-nanopositioning suitable for various tasks. New developed nanoprobes (optical focus probe, nanoindenter, metrological scanning force microscope) and results of measurement will be presented.

Long-range nanopositioning and nanomeasuring machine for application to micro- and nanotechnology

The paper describes the operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine). The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universität Ilmenau. The machine was successfully tested and continually improved in the last few years. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). Three plane mirror miniature interferometers are installed into the NPM-machine having a resolution of less than 0,1 nm over the entire positioning and measuring range of 25 mm x 25 mm x 5 mm. An Abbe offset-free design of the three miniature plane mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide extraordinary accuracy with an expanded uncertainty of only 5 - 10 nm. The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor, tactile stylus probe and of a 3D-micro-touch-probe are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.

Precision mechatronics based on high-precision measuring and positioning systems and machines

Precision mechatronics is defined in the paper as the science and engineering of a new generation of high precision systems and machines. Nanomeasuring and nanopositioning engineering represents important fields of precision mechatronics. The nanometrology is described as the todays limit of the precision engineering. The problem, how to design nanopositioning machines with uncertainties as small as possible will be discussed. The integration of several optical and tactile nanoprobes makes the 3D-nanopositioning machine suitable for various tasks, such as long range scanning probe microscopy, mask and wafer inspection, nanotribology, nanoindentation, free form surface measurement as well as measurement of microoptics, precision molds, microgears, ring gauges and small holes.

Multi-component force measurement in micromachining

Abstract An experimental setup for performing micro-scratching tasks and measuring the forces involved in the process is presented in this paper. The main component of the system is a multi-component force and torque sensor based on the principle of electromagnetic force compensation (EMFC). With this device it is possible to perform the micromachining process itself while simultaneously measuring the interaction forces between the tool tip and the test specimen. Experiments were performed with specimens of polished steel, silicon and glass. Planar micro-structures could be produced and tool point interaction forces in the order of some millinewtons were measured during the process.