Roxana Arvinte

p-Type Doping of 4H- and 3C-SiC Epitaxial Layers with Aluminum

Exhaustive experimental study of aluminum incorporation in epitaxial 4H-SiC and 3C‑SiC films grown by chemical vapor deposition (CVD) was performed. The influence of polytype and substrate orientation was verified. Role of principal process conditions (growth temperature and pressure, deposition rate, chemical environment) was investigated in details. Finally, the evolution of optical properties of resulting SiC films with Al content was examined.

Electrical Transport Properties of Highly Aluminum Doped p-Type 4H-SiC

In the range 80 K-900 K, we have investigated the electrical properties of heavily aluminum in-situ doped, 4H-SiC samples. The temperature dependence of the hole concentration and Hall mobility was analyzed in the model taking into account heavy and light holes. The modelisation parameters were compared with experimental values of Secondary Ion Mass Spectroscopy (SIMS) and Capacitance-Voltage (CV) measurements.

Effect of germanium doping on electrical properties of n-type 4H-SiC homoepitaxial layers grown by chemical vapor deposition

The effect of germanium (Ge) on n-type 4H-SiC is experimentally studied by electrical characterization of homoepitaxial layers grown by chemical vapor deposition (CVD). Measurements show that electrical properties of epitaxial layers can be changed by intentional incorporation of germane (GeH4) gas during the deposition process. On the nanoscale, two-dimensional mappings acquired with conductive atomic force microscopy show preferential conductive paths on the surface of Ge-doped samples, which are related to the presence of this isoelectronic impurity. Hall effect measurements confirm that also macroscopic electrical properties of n-type 4H-SiC are improved due to incorporation of Ge into SiC during CVD growth. In particular, despite equal free electron concentration, enhanced mobility in a wide temperature range is measured in Ge-doped samples as compared to a pure 4H-SiC layer. Based on our results from Hall effect measurements as well as admittance spectroscopy and deep level transient spectroscopy, i...

Characterization of Ge-Doped Homoepitaxial Layers Grown by Chemical Vapor Deposition

We have investigated the electrical properties of n-type 4H-SiC in-situ germanium-doped homoepitaxial layers grown by chemical vapor deposition. Germanium is an isoelectronic impurity and, therefore, not expected to contribute to the conductivity. However, Hall effect measurements taken on samples with and without germanium revealed an enhanced mobility by a factor of ≈2 at T ≈ 55 K in the germanium-doped sample despite equal free electron concentration and equal compensation. Deep level transient spectroscopy (DLTS) measurements taken on germanium-doped samples reveal negative peaks indicating the presence of charged extended defects.

Investigation of Aluminum Incorporation in 4H-SiC Epitaxial Layers

In the present contribution, the trends in voluntary incorporation of aluminum in 4H-SiC homoepitaxial films are investigated. The films were grown on Si-and C-face 4H-SiC 8°off substrates by chemical vapor deposition (CVD) in a horizontal, hot wall CVD reactor. Secondary Ion Mass Spectrometry (SIMS) and capacitance-voltage (C-V) measurements were used to determine the Al incorporation in the samples. The influence of Trimethylaluminum (TMA) flow rate, growth temperature, growth pressure and C/Si ratio on the dopant incorporation was studied.

Influence of Site Competition Effects on Dopant Incorporation during Chemical Vapor Deposition of 4H-SiC Epitaxial Layers

An exhaustive experimental study of the influence of C/Si ratio on voluntary incorporation of nitrogen (N) and aluminum (Al) in 4H-SiC thin films is presented. The films were grown by chemical vapor deposition (CVD) in a horizontal, hot wall CVD reactor on Si- and C-face substrates, under Si-rich and C-rich conditions. Under some conditions the observed variation of dopant incorporation with C/Si ratio could be clearly attributed to the site competition effects, while in several cases other mechanisms have to be taken into account.

Influence of growth temperature on site competition effects during chemical vapor deposition of 4H-SiC layers

After presenting an exhaustive experimental study of aluminum incorporation in epitaxial 4H-SiC and 3CSiC films grown by chemical vapor deposition (CVD), we focalize once more on what is called site competition effects. We observed that the influence of C/Si ratio on dopant (Al, N) incorporation in SiC was qualitatively different depending on whether the growth experiments were performed in “low temperature” (LT) or “high temperature” (HT) regime. Partial explanation of observed phenomena basing on thermal evolution of carbon coverage of SiC surface is proposed.

Comparative Study of n-Type 4H-SiC: Raman vs Photoluminescence Spectroscopy

This paper presents a comparative optical and vibrational spectroscopy study of diversely n-type 4H-SiC epilayers. It is shown that in order to determine the nitrogen doping in a wide range (1016 up to few 1019cm-3) the two techniques are complementary. Moreover only the LTPL provides the information about the compensation and nature of the dopant species.

Optical Characterization of p-Type 4H-SiC Epilayers

A series of aluminium doped (from 2×1016 to 8×1019 cm-3) 4H-SiC epitaxial layers were mainly studied by Low Temperature Photoluminescence and time-resolved optical pump-probe techniques to determine the concentration of aluminium, its activation ratio, the doping related carrier lifetime, hole mobility and excess carrier diffusion length.

Raman Investigation of Heavily Al Doped 4H-SiC Layers Grown by CVD

In this work, we focus on heavily aluminum (Al) doped 4H-SiC samples. We compare the effect of the Al concentration and Hall carrier concentration on the Raman spectra in a large frequency range. The Al concentration measured by Secondary Ion Mass Spectrometry ranged from 2×1016 to 8.4×1019 cm-3 while the electrical measurement give a carrier concentration up to 5×1019 Al×cm-3. On the Raman spectra, three different frequency domains have been analysed: i) at high frequency where we consider the change in longitudinal optical phonon-plasmon coupled mode; ii°) at low frequency where we consider the continuum of electronic transitions and iii°) finally, considering the Fano interference effect between the continuum of electronic transitions and the Folded Transverse Acoustic phonon modes. This analysis is applied to comment a Raman spectra mapping collected on a 4H-SiC 2 inch wafer.