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Rudolf Von Buenau

Carl Zeiss AG

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Publication

Featured researches published by Rudolf Von Buenau.

Archive | 2005

CATADIOPTRIC PROJECTION OBJECTIVE

David Shafer; Wilhelm Ulrich; Aurelian Dodoc; Rudolf Von Buenau; Hans-Juergen Mann; Alexander Epple

Archive | 2002

Microlithographic illumination method and a projection lens for carrying out the method

Toralf Gruner; Manfred Maul; Rudolf Von Buenau

Archive | 2004

Projection method including pupillary filtering and a projection lens therefor

Hubert Holderer; Christian Hembd-Soellner; Rudolf Von Buenau; Ulrich Haag

Archive | 2001

Projektionsbelichtungsanlage sowie Verfahren zur Kompensation von Abbildungsfehlern in einer Projektionsbelichtungsanlage, insbesondere für die Mikro-Lithographie

Rudolf Von Buenau; Christian Hembd-Soellner; Hubert Holderer

Archive | 2001

Projection exposure system, especially for micro-lithography, has position sensitive correction sensor element that detects wavefront of measurement light beam or beams

Rudolf Von Buenau; Christian Hemd-Soellner; Hubert Holderer

Archive | 2001

Microlithographic exposure involves compensating path difference by controlled variation of first and/or second optical paths; image plane difference is essentially independent of incident angle

Toralf Gruner; Manfred Maul; Rudolf Von Buenau

Archive | 1999

Optical system and method for compensating for non-rotationally symmetrical image defects in an optical system has a slit-shaped image field or non-rotationally symmetrical lighting, a light source, a lens and a mirror.

Stefan Xalter; Jochen Becker; Rudolf Von Buenau; Christian Wagner; Werner Mueller-Rismann; Wolfgang Hummel; Hubert Holderer

Archive | 2015

CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES

David Shafer; Wilhelm Ulrich; Aurelian Dodoc; Rudolf Von Buenau; Hans-Juergen Mann; Alexander Epple

Archive | 2014

CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND NO MORE THAN FOUR LENSES BETWEEN THE APERTURE STOP AND IMAGE PLANE

David Shafer; Wilhelm Ulrich; Aurelian Dodoc; Rudolf Von Buenau; Hans-Juergen Mann; Alexander Epple

Archive | 2013

Immersion catadioptric projection objective having two intermediate images

David Shafer; Wilhelm Ulrich; Aurelian Dodoc; Rudolf Von Buenau; Hans-Juergen Mann; Alexander Epple; Susanne Beder; Wolfgang Singer

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Hubert Holderer

Carl Zeiss AG

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Christian Hembd-Soellner

Carl Zeiss AG

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Alexander Epple

Carl Zeiss AG

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Aurelian Dodoc

Carl Zeiss AG

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David Shafer

Carl Zeiss AG

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Hans-Juergen Mann

Carl Zeiss AG

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Wilhelm Ulrich

Carl Zeiss AG

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Toralf Gruner

Carl Zeiss AG

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Ulrich Haag

Carl Zeiss AG

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Christian Wagner

Carl Zeiss AG

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