Hubert Holderer | Researchain

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Featured researches published by Hubert Holderer.

Archive | 2008

Projection objective of a microlithographic projection exposure apparatus

Olaf Conradi; Sascha Bleidistel; Markus Hauf; Wolfgang Hummel; Arif Kazi; Baerbel Schwaer; Jochen Weber; Hubert Holderer; Payam Tayebati; Boris Bittner

Archive | 1999

Optical system, especially a projection light facility for microlithography

Erwin Gaber; Christian Wagner; Hubert Holderer; Michael Gerhard; Erich Merz; Jochen Becker; Arie Cornelis Scheiberlich

Archive | 1999

Assembly of optical element and mount

Hubert Holderer; Peter Rümmer; Michael Trunz

Archive | 2004

Facet mirror having a number of mirror facets

Hubert Holderer; Andreas Heisler; Wolfgang Singer; Markus Weiss; Andreas Seifert; Frank Melzer; Heinz Mann; Jürgen Faltus; Berndt Warm; Stefan Dornheim

Archive | 2005

Projection lens and microlithographic projection exposure apparatus

Martin Brunotte; Jürgen Hartmaier; Hubert Holderer; Winfried Kaiser; Alexander Kohl; Jens Kugler; Manfred Maul; Christian Wagner

Archive | 2002

Projection exposure system as well as a process for compensating image defects occuring in the projection optics of a projection exposure system, in particular for microlithography

Rudolf von Bünau; Christian Hembd-Söllner; Hubert Holderer

Archive | 2002

Microlithographic projection illumination system

Martin Brunotte; Juergen Hartmaier; Hubert Holderer; Winfried Kaiser; Alexander Kohl; Jens Kugler; Manfred Maul; Christian Wagner

Archive | 2002

Imaging device in a projection exposure facility

Wolfgang Hummel; Juergen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schoengart; Markus Neumaier; Baerbel Trossbach; Ulrich Weber; Michael Muehlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

Archive | 2004