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Wiley Encyclopedia of Electrical and Electronics Engineering | 1999

Semiconductor Factory Control and Optimization

Stephanie Watts Butler; Rudy L. York; Marylyn Hoy Bennett; Tom Winter

The sections in this article are 1 Control in Breadth 2 Generic Model of the Elements of a Controller 3 Control in Depth 4 Change Management 5 Statistical Process Control 6 Run-to-Run Model-Based Process Control 7 Equipment Signal Monitoring, Real-Time Fault Detection and Classification 8 Sensors 9 In Situ Particle Monitors 10 In-Line Defect Monitoring and Contamination Control 11 Wafer Position Tracking 12 Data Mining and Data Warehousing 13 Parametric and Yield Outlier Control 14 Wafer Level Reliability Control 15 Multivariate SPC, Especially for Equipment Signal Monitoring 16 Acknowledgments


Archive | 1991

Method for dry etching openings in integrated circuit layers

Jerome L. Elkind; Patricia B. Smith; Larry D. Hutchins; Joseph D. Luttmer; Rudy L. York; Julie S. England


Archive | 1988

Wafer processing apparatus having independently controllable energy sources

Cecil J. Davis; Rhett B. Jucha; Joseph D. Luttmer; Rudy L. York; Lee M. Loewenstein; Robert T. Matthews; Randall C. Hildenbrand


Archive | 1988

Method of sequential cleaning and passivating a GaAs substrate using remote oxygen plasma

Rudy L. York; Joseph D. Luttmer; Patricia B. Smith; Cecil J. Davis


Archive | 1992

Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation

Cecil J. Davis; Rhett B. Jucha; Joseph D. Luttmer; Rudy L. York; Lee M. Loewenstein; Robert T. Matthews; Randall C. Hildenbrand


Archive | 1992

Method for forming an infrared detector having a refractory metal

Rudy L. York; Joseph D. Luttmer; Chang F. Wan; Thomas W. Orent; Larry D. Hutchins; Art Simmons


Archive | 1993

Method of forming infrared detector by hydrogen plasma etching to form refractory metal interconnects

Larry D. Hutchins; Rudy L. York


Archive | 1988

Method for passivating wafer

Joseph D. Luttmer; Cecil J. Davis; Patricia B. Smith; Rudy L. York


Archive | 1988

Method for depositing compound from group II-VI

Joseph D. Luttmer; Rudy L. York; Patricia B. Smith; Cecil J. Davis


Archive | 1987

Method for etching films of mercury-cadmium-telluride and zinc sulfid

Joseph D. Luttmer; Cecil J. Davis; Patricia B. Smith; Rudy L. York; Lee M. Loewenstein; Rhett B. Jucha

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