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Ryo Nonaka

Tokyo Electron

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Publication

Featured researches published by Ryo Nonaka.

Archive | 1996

Plasma process utilizing an electrostatic chuck

Masahiro Ogasawara; Ryo Nonaka; Yoshiyuki Kobayashi

Archive | 2008

Temperature control device for target substrate, temperature control method and plasma processing apparatus including same

Ryo Nonaka; Koichi Murakami

Archive | 2008

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE CLEANING APPARATUS

Tsuyoshi Moriya; Tadashi Onishi; Ryo Nonaka; Eiichi Nishimura

Archive | 1999

Plasma apparatus and lower electrode thereof

Chihiro Taguchi; Ryo Nonaka

Archive | 2007

Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod

Daisuke Hayashi; Kazuya Nagaseki; Shinji Himori; Atsushi Matsuura; Ryo Nonaka

Archive | 2010

Temperature control system and temperature control method for substrate mounting table

Yasuharu Sasaki; Ryo Nonaka; Nobuyuki Nagayama

Archive | 2009

MECHANISM FOR VARYING CYLINDER STOP POSITION AND SUBSTRATE PROCESSING APPARATUS INCLUDING SAME

Daisuke Hayashi; Ryo Nonaka

Archive | 2008

Substrate processing system and substrate cleaning apparatus including a jetting apparatus

Tsuyoshi Moriya; Tadashi Onishi; Ryo Nonaka; Eiichi Nishimura

Archive | 2003

Plasma processing device and feeding unit

Daisuke Hayashi; Kazuya Nagaseki; Shinji Himori; Atsushi Matsuura; Ryo Nonaka

Archive | 2009

Mechanism for varying the end of stroke position of a cylinder and substrate processing apparatus including same

Daisuke Hayashi; Ryo Nonaka

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Collaboration

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Daisuke Hayashi

Tokyo Electron

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Atsushi Matsuura

Tokyo Electron

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Kazuya Nagaseki

Tokyo Electron

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Shinji Himori

Tokyo Electron

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Eiichi Nishimura

Tokyo Electron

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Tadashi Onishi

Tokyo Electron

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Tsuyoshi Moriya

Tokyo Electron

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Chihiro Taguchi

Tokyo Electron

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Koichi Murakami

Tokyo Electron

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Masahiro Ogasawara

Tokyo Electron

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