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Ryu Nakano

ASM International

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Publication

Featured researches published by Ryu Nakano.

Archive | 2014

Methods for forming doped silicon oxide thin films

Noboru Takamure; Atsuki Fukazawa; Hideaki Fukuda; Antti Niskanen; Suvi Haukka; Ryu Nakano; Kunitoshi Namba

Archive | 2012

Footing reduction using etch-selective layer

Ryu Nakano

Archive | 2012

Method for stabilizing plasma ignition

Ryu Nakano; Tsutomu Makino; Hisashi Takamizawa

Archive | 2013

Method For Controlling In-Plane Uniformity Of Substrate Processed By Plasma-Assisted Process

Ryu Nakano; Naoki Inoue

Archive | 2014

Low-Oxidation Plasma-Assisted Process

Ryu Nakano; Naoki Inoue; Kunitoshi Namba

Archive | 2014

Method for Stabilizing Reaction Chamber Pressure

Ryu Nakano; Wataru Adachi

Archive | 2004

METHOD OF FORMING FLUORINE-DOPED LOW-DIELECTRIC-CONSTANT INSULATING FILM

Naoto Tsuji; Yozo Ikedo; Ryu Nakano; Shuzo Hebiguchi

Archive | 2007

PLASMA CVD APPARATUS EQUIPPED WITH PLASMA BLOCKING INSULATION PLATE

Mitsutoshi Shuto; Yasushi Fukasawa; Ryu Nakano; Yasuaki Suzuki

Archive | 2005

Plasma processing apparatus with insulated gas inlet pore

Yu Yoshizaki; Ryu Nakano

Archive | 2013

Method for Forming Oxide Film by Plasma-Assisted Processing

Ryu Nakano; Naoki Inoue

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Collaboration

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Naoki Inoue

ASM International

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Hideaki Fukuda

ASM International

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Kunitoshi Namba

ASM International

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Noboru Takamure

ASM International

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Antti Niskanen

ASM International

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Atsuki Fukazawa

ASM International

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Hiroki Arai

ASM International

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Hisashi Takamizawa

ASM International

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Mitsutoshi Shuto

ASM International

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Naoto Tsuji

ASM International

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