S. P. DenBaars

Direct formation of quantum‐sized dots from uniform coherent islands of InGaAs on GaAs surfaces

The 2D–3D growth mode transition during the initial stages of growth of highly strained InGaAs on GaAs is used to obtain quantum‐sized dot structures. Transmission electron micrographs reveal that when the growth of In0.5Ga0.5As is interrupted exactly at the onset of this 2D–3D transition, dislocation‐free islands (dots) of the InGaAs result. Size distributions indicate that these dots are ∼300 A in diameter and remarkably uniform to within 10% of this average size. The areal dot densities can be varied between 109 and 1011 cm−2. The uniformity of the dot sizes is explained by a mechanism based on reduction in adatom attachment probabilities due to strain. We unambiguously demonstrate photoluminescence at ∼1.2 eV from these islands by comparing samples with and without dots. The luminescent intensities of the dots are greater than or equal to those of the underlying reference quantum wells.

Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening

Roughened surfaces of light-emitting diodes (LEDs) provide substantial improvement in light extraction efficiency. By using the laser-lift-off technique followed by an anisotropic etching process to roughen the surface, an n-side-up GaN-based LED with a hexagonal “conelike” surface has been fabricated. The enhancement of the LED output power depends on the surface conditions. The output power of an optimally roughened surface LED shows a twofold to threefold increase compared to that of an LED before surface roughening.

Role of threading dislocation structure on the x‐ray diffraction peak widths in epitaxial GaN films

In this letter we demonstrate that the anomalously low (002) x‐ray rocking curve widths for epitaxial hexagonal GaN films on (001) sapphire are a result of a specific threading dislocation (TD) geometry. Epitaxial GaN films were grown on c‐plane sapphire by atmospheric pressure metalorganic chemical vapor deposition (MOCVD) in a horizontal flow reactor. Films were grown with (002) rocking curves (ω‐scans) widths as low as 40 arcsec and threading dislocation densities of ∼2×1010 cm−2. The threading dislocations in this film lie parallel to the [001] direction and within the limit of imaging statistics, all are pure edge with Burgers vectors parallel to the film/substrate interface. These TDs will not distort the (002) planes. However, distortion of asymmetric planes, such as (102), is predicted and confirmed in (102) rocking curve widths of 740 arcsec. These results are compared with films with (002) rocking curves of ∼270 arcsec and threading dislocation densities of ∼7×108 cm−2.

Polarization effects, surface states, and the source of electrons in AlGaN/GaN heterostructure field effect transistors

The origin of the two-dimensional electron gas (2DEG) in AlGaN/GaN heterostructure field effect transistors is examined theoretically and experimentally. Based on an analysis of the electrostatics, surface states are identified as an important source of electrons. The role of the polarization-induced dipole is also clarified. Experimental Hall data for nominally undoped Al0.34Ga0.66N/GaN structures indicate that ∼1.65 eV surface donors are the actual source of the electrons in the 2DEG, which forms only when the barrier thickness exceeds 35 A.

“S-shaped” temperature-dependent emission shift and carrier dynamics in InGaN/GaN multiple quantum wells

We report temperature-dependent time-integrated and time-resolved photoluminescence (PL) studies of InGaN/GaN multiple quantum wells (MQWs) grown by metalorganic chemical vapor deposition. We observed anomalous emission behavior, specifically an S-shaped (decrease–increase–decrease) temperature dependence of the peak energy (Ep) for InGaN-related PL with increasing temperature: Ep redshifts in the temperature range of 10–70 K, blueshifts for 70–150 K, and redshifts again for 150–300 K with increasing temperature. In addition, when Ep redshifts, the spectral width is observed to narrow, while when Ep blueshifts, it broadens. From a study of the integrated PL intensity as a function of temperature, it is found that thermionic emission of photocarriers out of local potential minima into higher energy states within the wells is the dominant mechanism leading to the thermal quenching of the InGaN-related PL. We demonstrate that the temperature-induced S-shaped PL shift is caused by a change in the carrier dyna...

Absorption coefficient, energy gap, exciton binding energy, and recombination lifetime of GaN obtained from transmission measurements

The absorption coefficient for a 0.4-μm-thick GaN layer grown on a polished sapphire substrate was determined from transmission measurements at room temperature. A strong, well defined exciton peak for the A and B excitons was obtained. The A, B, and C excitonic features are clearly defined at 77 K. At room temperature, an energy gap Eg=3.452±0.001 eV and an exciton binding energy ExA,B=20.4±0.5 meV for the A and B excitons and ExC=23.5±0.5 meV for the C exciton were determined by analysis of the absorption coefficient. From this measured absorption coefficient, together with the detailed balance approach of van Roosbroek and Shockley, the radiative constant B=1.1×10−8 cm3/s was obtained.

Structural characterization of nonpolar (112̄0) a-plane GaN thin films grown on (11̄02) r-plane sapphire

In this letter we describe the structural characteristics of nonpolar (1120) a-plane GaN thin films grown on (1102) r-plane sapphire substrates via metalorganic chemical vapor deposition. Planar growth surfaces have been achieved and the potential for device-quality layers realized by depositing a low temperature nucleation layer prior to high temperature epitaxial growth. The in-plane orientation of the GaN with respect to the r-plane sapphire substrate was confirmed to be [0001]GaN‖[1101]sapphire and [1100]GaN‖[1120]sapphire. This relationship is explicitly defined since the polarity of the a-GaN films was determined using convergent beam electron diffraction. Threading dislocations and stacking faults, observed in plan-view and cross-sectional transmission electron microscope images, dominated the a-GaN microstructure with densities of 2.6×1010 cm−2 and 3.8×105 cm−1, respectively. Submicron pits and crystallographic terraces were observed on the optically specular a-GaN surface with atomic force m...

Effective band gap inhomogeneity and piezoelectric field in InGaN/GaN multiquantum well structures

The emission mechanisms of strained InxGa1−xN quantum wells (QWs) were shown to vary depending on the well thickness, L, and x. The absorption edge was modulated by the quantum confined Stark effect and quantum confined Franz-Keldysh effect (QCFK) for the wells, in which, for the first approximation, the product of the piezoelectric field, FPZ, and L exceed the valence band discontinuity, ΔEV. In this case, holes are confined in the triangular potential well formed at one side of the well producing the apparent Stokes-like shift. Under the condition that FPZ×L exceeds the conduction band discontinuity ΔEC, the electron-hole pair is confined at opposite sides of the well. The QCFK further modulated the emission energy for the wells with L greater than the three dimensional free exciton Bohr radius aB. On the other hand, effective in-plane localization of carriers in quantum disk size potential minima, which are produced by nonrandom alloy compositional fluctuation enhanced by the large bowing parameter and...

Defect structure of metal‐organic chemical vapor deposition‐grown epitaxial (0001) GaN/Al2O3

Defect structures were investigated by transmission electron microscopy for GaN/Al2O3 (0001) epilayers grown by metal‐organic chemical vapor deposition using a two‐step process. The defect structures, including threading dislocations, partial dislocation bounding stacking faults, and inversion domains, were analyzed by diffraction contrast, high‐resolution imaging, and convergent beam diffraction. GaN film growth was initiated at 600 °C with a nominal 20 nm nucleation layer. This was followed by high‐temperature growth at 1080 °C. The near‐interfacial region of the films consists of a mixture of cubic and hexagonal GaN, which is characterized by a high density of stacking faults bounded by Shockley and Frank partial dislocations. The near‐interfacial region shows a high density of inversion domains. Above ∼0.5 μm thickness, the film consists of isolated threading dislocations of either pure edge, mixed, or pure screw character with a total density of ∼7×108 cm−2. The threading dislocation reduction in the...

Homoepitaxial growth of GaN under Ga-stable and N-stable conditions by plasma-assisted molecular beam epitaxy

The structure, morphology, and optical properties of homoepitaxial GaN layers grown by molecular beam epitaxy on metalorganic chemical vapor deposition (MOCVD)-grown GaN “template” layers were investigated as a function of the group III/group V flux ratio during growth. GaN layers grown with a low III/V ratio (N-stable growth) displayed a faceted surface morphology and a tilted columnar structure with a high density of stacking faults. In contrast, films grown with a high III/V ratio (Ga-stable growth) displayed comparable structure to the underlying MOCVD-grown template. The transition from N-stable to Ga-stable growth modes was found to occur over a narrow range of Ga fluxes at a growth temperature of 650 °C. Evidence of Ga accumulation and step-flow growth was observed for films grown under Ga-stable conditions, leading to the formation of spiral growth features at the surface termination of mixed edge/screw dislocations. Photoluminescence measurements indicate that the deep-level (∼550 nm) emission is...