Sang-Kil Lee
Samsung
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Publication
Featured researches published by Sang-Kil Lee.
Scientific Reports | 2013
ChaeHo Shin; Kyongjun Kim; JeongHoi Kim; Woo-Seok Ko; Yu-Sin Yang; Sang-Kil Lee; Chung Sam Jun; Youn Sang Kim
We fabricated a novel in-line conductive atomic force microscopy (C-AFM), which can analyze the resistive failures and examine process variance with an exact-positioning capability across the whole wafer scale in in-line DRAM fabrication process. Using this in-line C-AFM, we introduced a new, non-destructive diagnosis for resistive failure in mobile DRAM structures. Specially, we focused on the self-aligned contact (SAC) process, because the failure of the SAC process is one of the dominant factors that induces the degradation of yield performance, and is a physically invisible defect. We successfully suggested the accurate pass mark for resistive-failure screening in the fabrication of SAC structures and established that the cause of SAC failures is the bottom silicon oxide layer. Through the accurate pass mark for the SAC process configured by the in-line C-AFM analyses, we secured a good potential method for preventing the yield loss caused by failures in DRAM fabrication.
Archive | 1996
Sang-Kil Lee; Yong-sik Seok
Archive | 2007
Myoung-kyoon Yim; Sang-Kil Lee
Archive | 2007
Eun-Suk Kang; Young-joon Choi; Sang-Kil Lee; Dae-Hyun Lee
Archive | 1996
Sang-Kil Lee; Hyun-Soon Jang
Archive | 2004
Pil-sik Hyun; Sun-Jin Kang; Sang-Kil Lee; Kyung-Ho Jung
Archive | 1996
Sang-Kil Lee; Young-Sik Seok
Archive | 2004
Pil-sik Hyun; Sun-Yong Choi; Sang-Kil Lee; Chung-sam Jun; Sang-Min Kim
Archive | 2004
Jin-woo Lee; Sang-Kil Lee; Byung-am Lee; Yong-Wan Kim; Hyo-Sang Cho; Byung-seol Ahn
Archive | 2008
Ki-hyun Hong; Hee-won Ko; Sang-Kil Lee